[1] Teng Lin, Song Shaozhong. Laser ultra-high reflector substrate polishing process [J]. Aviation Precision Manufacturing Technology, 1997, 33(3): 1~3
[2] Chen Yang, Chen Jianqing, Chen Zhigang. Super smooth surface polishing technology [J]. J. Jiangsu University, 2003, 24(5): 55~59
[3] Hang Lingxia, Zhu Xueliang, Liu Weiguo. Research of combination polishing technology[C]. SPIE, 2010, 7655: 235~239
[4] Taylor Hobson. Talysurf CCI (User′s Guide) [M].3nd ed. London, 2004
[5] J. C. Tsang, G. S. Oehriein, Ivan Halier. Raman spectroscopy of relative ion etching induced subsurface damage[J]. Appl. Phys. Lett., 1985, 46(6): 589~591
[6] Wang Guixia. Research of Backscatter Measurement Technology [D].Xi′an: Xi′an Technological University, 2008
[7] Pang Yunxia. Research of Optical Components and Surface Damage Theory [D]. Xi′an: Xi′an Technological University, 2007
[8] F. Draheim, B. Harniseh, T. Weigel. Sub-surface damage of optical components and the influence on scattering propertiets[C]. SPIE, 1994, 2210: 709~713
[10] Ye Qing, Li Fuxin, Liu Yu et al.. Dual-wavelength optical coherence tomography system[J]. Laser & Optoelectronics Progress, 2010, 47(4): 41701
[11] Yang Zhaojin, Yu Shuai, Xie Qi. Radiation metrology technology after into 21 century[J]. Laser & Optoelectronics Progress, 2010, 47(3): 31201