Ion implantation process and lattice damage mechanism of boron doped crystalline germanium

Um E HABIBA; Tian-Ye CHEN; Chi-Xian LIU; Wei DOU; Xiao-Yan LIU; Jing-Wei LING; Chang-Yi PAN; Peng WANG; Hui-Yong DENG; Hong SHEN; Ning DAI

doi:10.11972/j.issn.1001-9014.2024.06.004

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