• Journal of Infrared and Millimeter Waves
  • Vol. 40, Issue 2, 178 (2021)
Hai-Feng CHENG1、2, Xiang ZHU2, Fang HOU1、2, San-Ming HU1、*, Jian GUO1, and Gui-Xiong SHI2
Author Affiliations
  • 1State Key Laboratory of Millimeter Wave,Southeast University,Nanjing 210096,China
  • 2Nanjing Electronic Device Institute,Nanjing 210016,China
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    DOI: 10.11972/j.issn.1001-9014.2021.02.007 Cite this Article
    Hai-Feng CHENG, Xiang ZHU, Fang HOU, San-Ming HU, Jian GUO, Gui-Xiong SHI. W-band power combining amplifier based on silicon micromachined waveguide[J]. Journal of Infrared and Millimeter Waves, 2021, 40(2): 178 Copy Citation Text show less
    Fabrication process of silicon waveguide
    Fig. 1. Fabrication process of silicon waveguide
    Model of the H-T splitter/combiner
    Fig. 2. Model of the H-T splitter/combiner
    Simulated results of the H-T splitter/combiner
    Fig. 3. Simulated results of the H-T splitter/combiner
    Model of the 3 dB coupler
    Fig. 4. Model of the 3 dB coupler
    Simulated results of the 3 dB coupler
    Fig. 5. Simulated results of the 3 dB coupler
    Model of the 4-way splitter/combiner
    Fig. 6. Model of the 4-way splitter/combiner
    Sectional view of the 4-way splitter/combiner
    Fig. 7. Sectional view of the 4-way splitter/combiner
    Simulated results of the 4-way splitter/combiner
    Fig. 8. Simulated results of the 4-way splitter/combiner
    Photographs of the fabricated 4-way splitter/combiner and the test fixture
    Fig. 9. Photographs of the fabricated 4-way splitter/combiner and the test fixture
    microscope view of waveguide port
    Fig. 10. microscope view of waveguide port
    The insertion and return losses of the silicon splitter /combiner
    Fig. 11. The insertion and return losses of the silicon splitter /combiner
    The typical tested result of W band GaN MMIC
    Fig. 12. The typical tested result of W band GaN MMIC
    The structure of the silicon combined module
    Fig. 13. The structure of the silicon combined module
    The silicon combined PA module
    Fig. 14. The silicon combined PA module
    The test platform of the silicon combined PA module
    Fig. 15. The test platform of the silicon combined PA module
    The measured output power, PAE and combining efficiency
    Fig. 16. The measured output power, PAE and combining efficiency
    Hai-Feng CHENG, Xiang ZHU, Fang HOU, San-Ming HU, Jian GUO, Gui-Xiong SHI. W-band power combining amplifier based on silicon micromachined waveguide[J]. Journal of Infrared and Millimeter Waves, 2021, 40(2): 178
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