Laser spallation technique, as a new micro-forming processing technique, is discussed, because several disadvantages exist in current micro-forming processing including size effect, unevenness in forming, low efficiency, high cost and high pollution. A theoretical analysis model is established to investigate the influential factors of thin films and substrate spallation under laser driven flyer. Laser energy, film thickness and type of film are investigated in experiment as they may affect the outcome of laser spallation micro-forming. The experiments show that the technique can achieve microstructure forming of thin films, and laser energy and film type are deciding factors in interfacial spallation. Film thickness within a certain range is less important, but it has significant influence on thin films micro-forming when it is out of the certain range. Therefore, laser spallation has the potential to become a controllable thin films micro-forming technique for commercial applications.