Surface temperature of substrate in laser-induced pyrolytic vapor deposition

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 10 >Issue 3 >Page 234 > Article

Acta Optica Sinica
Vol. 10, Issue 3, 234 (1990)

Surface temperature of substrate in laser-induced pyrolytic vapor deposition

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Surface temperature of substrate in laser-induced pyrolytic vapor deposition[J]. Acta Optica Sinica, 1990, 10(3): 234 Copy Citation Text

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Abstract

The distribution of surface temperature and temperature rising of a thin quartz substrate illuminated by a CW CO2 laser was calculated theoretically and measured experimentally. The results were used to analyze the experiments of CW CO2 laser induced pyrolysis of W(CO)6 for depositing large area tungsten films on quartz substrate.

Keywords

surface temperature vapor deposition laser

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Surface temperature of substrate in laser-induced pyrolytic vapor deposition[J]. Acta Optica Sinica, 1990, 10(3): 234

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