Author Affiliations
1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710054, China2Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China3Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, 999077, China4Nanomanufacturing Laboratory (NML), City University of Hong Kong Shenzhen Research Institute, Shenzhen, Guangdong 518057, Chinashow less
Fig. 1. Nanojoint of Ag nanowires obtained by different nanowelding methods. (a) Femtosecond laser induced nanowelding
[23-25]; (b) irradiation by halogen tungsten lamps
[16]; (c) low temperature pressure welding
[27]; (d) Joule heating jointing
[12]; (e) high temperature annealing
[11] Fig. 2. Electrical performance test of nano interconnection. (a) Two-point contact measurement based on nanometer operation probe
[33]; (b) integrated measurement based on MEMS and scanning electron microscopy
[34-35] Fig. 3. Mechanical performance test of nano-interconnect structure. (a)(b) Measurement method based on AFM and optical microscope
[38,45]; (c) MEMS-assisted measurement
[46]; (d) measurement based on TEM-SEM chip
[47-48]; (e) TEM-AFM
in-situ integrated measurement
[26] Fig. 4. Ag-Ag local plasma welding induced by continuous laser
[56]. (a)-(d)
In-situ welding of Ag nanowire gaps; (e) electrical properties of Ag nanowires before and after cutting and after nanoheating; (f) electrical properties of lap Ag nanowire before and after nanosoldering
Fig. 5. Nano interconnection of heterogeneous metals. (a) Three-dimensional arch bridge structure with continous laser-induced connection of Ag nanowires and Au electrodes and its electrical/ mechanical properties
[57]; (b) ultrathin Ag-Au nanowires cold welding
[7]; (c) cold welding of ultra-thin Cu-Al nanowires
[58] Fig. 6. Laser-induced nanowelding between ZnO and Ag nanowires
[59]. (a) Schematic; (b) morphology of single welded junction; (c) temperature distribution of nanowire; (d) welding image of ZnO and Au electrodes; (e)
I-V (current-voltage) curves before and after welding; (f) semilog plot of current-voltage characteristic curve
Fig. 7. Laser-induced nanowelding between metal electrodes and semiconductor nanomaterials. (a)-(d) Femtosecond laser-induced Au/SiO
2/SiC heterogeneous nanojoint and electrical characteristics of three-terminal devices
[61]; (e)(f) laser-induced heterogeneous nanojoint between metal electrodes and graphene and its photoelectric performance
[63] Fig. 8. Electrical/mechanical properties of flexible interconnected thin films welded by laser plasma
[71]. (a) Fatigue resistance test of Cu nanowires; (b) laser induced long Ag nanowires interconnection and its electrical/mechanical performance testing
Fig. 9. Electrical/mechanical performance of thin films based on metal nanowelding networks. (a)-(c) Laser-induced flexible mesh structure based on Cu nanoparticles
[74]; (d) stripping testing of interconnected Ag nanowires and flexible substrate
[73] Fig. 10. Electrical/mechanical performance of thin films based on interconnection networks of carbon-based nanomaterials. (a)(b) Laser-induced nanowelding between CNTs and flexible substrate and mechanics properties testing
[79]; (c) laser-induced carbon nanotubes interconnect with metal electrodes
[64]; (d) laser-induced carbon nanotubes interconnection network
[81] Fig. 11. Electrical/mechanical performance of semiconductor interconnect structures. (a) Femtosecond laser-induced nanowelding between ZnO nanowires and its photoelectrical response
[23]; (b) laser-induced interconnection of ZnO and GaN thin films and electroluminescence enhancement of the device after interconnection
[84]