• Chinese Journal of Lasers
  • Vol. 48, Issue 8, 0802021 (2021)
Xiaoying Ren1、2、3、4, Jianlei Cui1、2、*, Yang Lu3、4, and Xuesong Mei1、2
Author Affiliations
  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710054, China
  • 2Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
  • 3Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, 999077, China
  • 4Nanomanufacturing Laboratory (NML), City University of Hong Kong Shenzhen Research Institute, Shenzhen, Guangdong 518057, China
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    DOI: 10.3788/CJL202148.0802021 Cite this Article Set citation alerts
    Xiaoying Ren, Jianlei Cui, Yang Lu, Xuesong Mei. Research Progress on Electrical/Mechanical Properties of Interconnection Structures Based on Nanowelding[J]. Chinese Journal of Lasers, 2021, 48(8): 0802021 Copy Citation Text show less
    Nanojoint of Ag nanowires obtained by different nanowelding methods. (a) Femtosecond laser induced nanowelding[23-25]; (b) irradiation by halogen tungsten lamps[16]; (c) low temperature pressure welding[27]; (d) Joule heating jointing[12]; (e) high temperature annealing[11]
    Fig. 1. Nanojoint of Ag nanowires obtained by different nanowelding methods. (a) Femtosecond laser induced nanowelding[23-25]; (b) irradiation by halogen tungsten lamps[16]; (c) low temperature pressure welding[27]; (d) Joule heating jointing[12]; (e) high temperature annealing[11]
    Electrical performance test of nano interconnection. (a) Two-point contact measurement based on nanometer operation probe[33]; (b) integrated measurement based on MEMS and scanning electron microscopy[34-35]
    Fig. 2. Electrical performance test of nano interconnection. (a) Two-point contact measurement based on nanometer operation probe[33]; (b) integrated measurement based on MEMS and scanning electron microscopy[34-35]
    Mechanical performance test of nano-interconnect structure. (a)(b) Measurement method based on AFM and optical microscope[38,45]; (c) MEMS-assisted measurement[46]; (d) measurement based on TEM-SEM chip[47-48]; (e) TEM-AFM in-situ integrated measurement[26]
    Fig. 3. Mechanical performance test of nano-interconnect structure. (a)(b) Measurement method based on AFM and optical microscope[38,45]; (c) MEMS-assisted measurement[46]; (d) measurement based on TEM-SEM chip[47-48]; (e) TEM-AFM in-situ integrated measurement[26]
    Ag-Ag local plasma welding induced by continuous laser[56]. (a)-(d) In-situ welding of Ag nanowire gaps; (e) electrical properties of Ag nanowires before and after cutting and after nanoheating; (f) electrical properties of lap Ag nanowire before and after nanosoldering
    Fig. 4. Ag-Ag local plasma welding induced by continuous laser[56]. (a)-(d) In-situ welding of Ag nanowire gaps; (e) electrical properties of Ag nanowires before and after cutting and after nanoheating; (f) electrical properties of lap Ag nanowire before and after nanosoldering
    Nano interconnection of heterogeneous metals. (a) Three-dimensional arch bridge structure with continous laser-induced connection of Ag nanowires and Au electrodes and its electrical/ mechanical properties[57]; (b) ultrathin Ag-Au nanowires cold welding[7]; (c) cold welding of ultra-thin Cu-Al nanowires[58]
    Fig. 5. Nano interconnection of heterogeneous metals. (a) Three-dimensional arch bridge structure with continous laser-induced connection of Ag nanowires and Au electrodes and its electrical/ mechanical properties[57]; (b) ultrathin Ag-Au nanowires cold welding[7]; (c) cold welding of ultra-thin Cu-Al nanowires[58]
    Laser-induced nanowelding between ZnO and Ag nanowires[59]. (a) Schematic; (b) morphology of single welded junction; (c) temperature distribution of nanowire; (d) welding image of ZnO and Au electrodes; (e) I-V (current-voltage) curves before and after welding; (f) semilog plot of current-voltage characteristic curve
    Fig. 6. Laser-induced nanowelding between ZnO and Ag nanowires[59]. (a) Schematic; (b) morphology of single welded junction; (c) temperature distribution of nanowire; (d) welding image of ZnO and Au electrodes; (e) I-V (current-voltage) curves before and after welding; (f) semilog plot of current-voltage characteristic curve
    Laser-induced nanowelding between metal electrodes and semiconductor nanomaterials. (a)-(d) Femtosecond laser-induced Au/SiO2/SiC heterogeneous nanojoint and electrical characteristics of three-terminal devices[61]; (e)(f) laser-induced heterogeneous nanojoint between metal electrodes and graphene and its photoelectric performance[63]
    Fig. 7. Laser-induced nanowelding between metal electrodes and semiconductor nanomaterials. (a)-(d) Femtosecond laser-induced Au/SiO2/SiC heterogeneous nanojoint and electrical characteristics of three-terminal devices[61]; (e)(f) laser-induced heterogeneous nanojoint between metal electrodes and graphene and its photoelectric performance[63]
    Electrical/mechanical properties of flexible interconnected thin films welded by laser plasma[71]. (a) Fatigue resistance test of Cu nanowires; (b) laser induced long Ag nanowires interconnection and its electrical/mechanical performance testing
    Fig. 8. Electrical/mechanical properties of flexible interconnected thin films welded by laser plasma[71]. (a) Fatigue resistance test of Cu nanowires; (b) laser induced long Ag nanowires interconnection and its electrical/mechanical performance testing
    Electrical/mechanical performance of thin films based on metal nanowelding networks. (a)-(c) Laser-induced flexible mesh structure based on Cu nanoparticles[74]; (d) stripping testing of interconnected Ag nanowires and flexible substrate[73]
    Fig. 9. Electrical/mechanical performance of thin films based on metal nanowelding networks. (a)-(c) Laser-induced flexible mesh structure based on Cu nanoparticles[74]; (d) stripping testing of interconnected Ag nanowires and flexible substrate[73]
    Electrical/mechanical performance of thin films based on interconnection networks of carbon-based nanomaterials. (a)(b) Laser-induced nanowelding between CNTs and flexible substrate and mechanics properties testing[79]; (c) laser-induced carbon nanotubes interconnect with metal electrodes[64]; (d) laser-induced carbon nanotubes interconnection network[81]
    Fig. 10. Electrical/mechanical performance of thin films based on interconnection networks of carbon-based nanomaterials. (a)(b) Laser-induced nanowelding between CNTs and flexible substrate and mechanics properties testing[79]; (c) laser-induced carbon nanotubes interconnect with metal electrodes[64]; (d) laser-induced carbon nanotubes interconnection network[81]
    Electrical/mechanical performance of semiconductor interconnect structures. (a) Femtosecond laser-induced nanowelding between ZnO nanowires and its photoelectrical response[23]; (b) laser-induced interconnection of ZnO and GaN thin films and electroluminescence enhancement of the device after interconnection[84]
    Fig. 11. Electrical/mechanical performance of semiconductor interconnect structures. (a) Femtosecond laser-induced nanowelding between ZnO nanowires and its photoelectrical response[23]; (b) laser-induced interconnection of ZnO and GaN thin films and electroluminescence enhancement of the device after interconnection[84]
    Xiaoying Ren, Jianlei Cui, Yang Lu, Xuesong Mei. Research Progress on Electrical/Mechanical Properties of Interconnection Structures Based on Nanowelding[J]. Chinese Journal of Lasers, 2021, 48(8): 0802021
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