• Chinese Optics Letters
  • Vol. 18, Issue 5, 051201 (2020)
Yan Zhao1、2 and Haiwei Zhang1、3、*
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Tianjin University of Technology, Tianjin 300384, China
  • 2Tianjin Key Laboratory for Control Theory and Applications in Complicated Systems, Tianjin 300384, China
  • 3Tianjin Key Laboratory of Film Electronic and Communication Device, Tianjin 300384, China
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    DOI: 10.3788/COL202018.051201 Cite this Article Set citation alerts
    Yan Zhao, Haiwei Zhang. Displacement measurement method based on laser self-mixing interference in the presence of speckle[J]. Chinese Optics Letters, 2020, 18(5): 051201 Copy Citation Text show less
    Schematic diagram of displacement measurement.
    Fig. 1. Schematic diagram of displacement measurement.
    Schematic diagram of displacement reconstruction: (a) SMI signal; (b) derivative of SMI signal; (c) result of fringe counting method; (d) result of interpolation method.
    Fig. 2. Schematic diagram of displacement reconstruction: (a) SMI signal; (b) derivative of SMI signal; (c) result of fringe counting method; (d) result of interpolation method.
    SMI experimental system of displacement measurement.
    Fig. 3. SMI experimental system of displacement measurement.
    (a) Experimental SMI signal of PZT vibration; (b) local amplification of experimental SMI signal of PZT vibration.
    Fig. 4. (a) Experimental SMI signal of PZT vibration; (b) local amplification of experimental SMI signal of PZT vibration.
    EEMD result of the experimental SMI signal.
    Fig. 5. EEMD result of the experimental SMI signal.
    Comparison of filtered signals with different IMFs.
    Fig. 6. Comparison of filtered signals with different IMFs.
    (a) Envelope of filtered SMI signal; (b) normalized SMI signal; (c) reconstructed displacement signal; (d) error of reconstruction displacement.
    Fig. 7. (a) Envelope of filtered SMI signal; (b) normalized SMI signal; (c) reconstructed displacement signal; (d) error of reconstruction displacement.
    (a) Experimental SMI signal of linear displacement table; (b) derivative of experimental SMI signal.
    Fig. 8. (a) Experimental SMI signal of linear displacement table; (b) derivative of experimental SMI signal.
    (a) Envelope of filtered SMI signal; (b) normalized SMI signal; (c) derivative of normalized SMI signal; (d) reconstructed displacement signal; (e) relative error of reconstruction displacement.
    Fig. 9. (a) Envelope of filtered SMI signal; (b) normalized SMI signal; (c) derivative of normalized SMI signal; (d) reconstructed displacement signal; (e) relative error of reconstruction displacement.
    Maximum Error (nm)Average Error (nm)Standard Deviation (nm)
    Algorithm of Ref. [11]392.9012.93218.60
    Algorithm of this paper388.128.89213.23
    Table 1. Displacement Reconstruction Results
    Yan Zhao, Haiwei Zhang. Displacement measurement method based on laser self-mixing interference in the presence of speckle[J]. Chinese Optics Letters, 2020, 18(5): 051201
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