In order to compensate aberrations of lithographic objective lens, an active liquid lens is developed, and characteristics of the aberrations varying of the active liquid lens is analyzed. The active liquid lens is constituted of deionised water and LiF. Firstly, considering the gravity and hydrostatic pressure, the forces are evenly applied to one to six points which are equally settled, and the deflection of lens is calculated; Secondly, deflection of the deformable lens is fitted with Zernike polynomials, and the functional relation between the aberrations expressed by standard Zernike polynomials and mechanical forces is established. The results show that: relation between the standard Zernike polynomial coefficients of active liquid lens and forces acted on it is strongly linear; First three aberrations of the active liquid lens are piston, defocus, and n-foil under multi-points forces except one point; With number of the force points increasing, defocus and piston regulating abilities of active liquid lens are of increasing trend, while the other kinds of aberrations regulating abilities are of downward trend.