• High Power Laser Science and Engineering
  • Vol. 12, Issue 6, 06000e77 (2024)
Xinhui Ding1,2, Hui Yu1,2, Dawei Li1, Junyong Zhang1..., Li Wang1, Qiong Zhou1 and Xingqiang Lu1,*|Show fewer author(s)
Author Affiliations
  • 1National Laboratory on High Power Lasers and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China
  • 2University of Chinese Academy of Sciences, Beijing, China
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    DOI: 10.1017/hpl.2024.51 Cite this Article Set citation alerts
    Xinhui Ding, Hui Yu, Dawei Li, Junyong Zhang, Li Wang, Qiong Zhou, Xingqiang Lu, "Improved method to optimize the phase jump of multiple exposure-tiled gratings," High Power Laser Sci. Eng. 12, 06000e77 (2024) Copy Citation Text show less

    Abstract

    Large-aperture gratings have significant applications in inertial confinement fusion, immersion lithography manufacturing and astronomical observation. Currently, it is challenging and expensive to manufacture sizable monolithic gratings. Therefore, tiled multiple small-aperture gratings are preferred. In this study, the impact of seam phase discontinuity on the modulation of the laser beam field was explored based on the measurement results of the Shenguang-II laser large-aperture multi-exposure-tiled grating. An innovative method for accurately calculating the phase jump of multi-exposure-tiled grating seams was proposed. An intensive electromagnetic field analysis was performed by applying rigorous coupled-wave analysis to a reasonably constructed micrometer-level periodic grating seam structure, and the phase jump appearing in millimeter-scale seams of large-aperture tiled gratings was obtained accurately.
    ε(x)=hehexp(j2πΛhx). ((1))

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    eh=1Λ0Λε(x)exp(j2πΛhx)dx. ((2))

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    δ=ϕsϕl, ((3))

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    Xinhui Ding, Hui Yu, Dawei Li, Junyong Zhang, Li Wang, Qiong Zhou, Xingqiang Lu, "Improved method to optimize the phase jump of multiple exposure-tiled gratings," High Power Laser Sci. Eng. 12, 06000e77 (2024)
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