• Laser & Optoelectronics Progress
  • Vol. 59, Issue 11, 1122005 (2022)
Yue Wang1、2, Aiyun Liu1, Wangzhou Shi1, Gujin Hu1、*, Chixian Liu2, Changyi Pan2, Yufeng Shan2, Yi Zhang2, Huiyong Deng2、**, and Ning Dai2
Author Affiliations
  • 1Department of Physics, College of Mathematics and Science, Shanghai Normal University, Shanghai 200234, China
  • 2State Key Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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    DOI: 10.3788/LOP202259.1122005 Cite this Article Set citation alerts
    Yue Wang, Aiyun Liu, Wangzhou Shi, Gujin Hu, Chixian Liu, Changyi Pan, Yufeng Shan, Yi Zhang, Huiyong Deng, Ning Dai. Design and Simulation of Far Infrared Microscopic Imaging Optical Systems[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1122005 Copy Citation Text show less
    Cross-sectional diagram of far infrared microscopic imaging optical system
    Fig. 1. Cross-sectional diagram of far infrared microscopic imaging optical system
    Simulated MTF curve of far infrared microscopic imaging optical system
    Fig. 2. Simulated MTF curve of far infrared microscopic imaging optical system
    Simulated spot diagrams of far infrared microscopic imaging optical system
    Fig. 3. Simulated spot diagrams of far infrared microscopic imaging optical system
    Simulated field curvature of far infrared microscopic imaging optical system
    Fig. 4. Simulated field curvature of far infrared microscopic imaging optical system
    Simulated distortion of far infrared microscopic imaging optical system
    Fig. 5. Simulated distortion of far infrared microscopic imaging optical system
    Enclosed energy map of optical system
    Fig. 6. Enclosed energy map of optical system
    ItemValue
    Working wave range /μm50-70
    Zoom ratio10

    NA

    Focal length /mm

    Image height /mm

    0.25

    14

    5

    Table 1. Parameter indexes of far infrared microscopic imaging optical system
    SurfaceRadius of curvature /mmInterval /μmGlass

    OBJ

    STO

    2

    3

    4

    5

    6

    7

    8

    9

    10

    11

    IMA

    -19.081

    -15.828

    -13.729

    -16.499

    -11.389

    -14.988

    9.958

    9.945

    -58.684

    118.289

    155

    2.002

    2.219

    2.229

    3.624

    5.575

    3.003

    2.430

    4.253

    4.663

    5.151

    4.853

    Silicon

    Silicon

    Silicon

    Silicon

    Silicon

    Table 2. Optimized structural parameters of far infrared microscopic imaging optical system
    SurfaceYNI

    1

    2

    3

    4

    5

    6

    7

    8

    9

    10

    11

    0.09694

    -0.70972

    -1.69917

    -1.66539

    -1.73224

    -1.82608

    -1.47518

    2.19516

    -0.05209

    -0.61923

    -0.29893

    Table 3. Cool reflection characteristic parameters of optical element surface
    Yue Wang, Aiyun Liu, Wangzhou Shi, Gujin Hu, Chixian Liu, Changyi Pan, Yufeng Shan, Yi Zhang, Huiyong Deng, Ning Dai. Design and Simulation of Far Infrared Microscopic Imaging Optical Systems[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1122005
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