Long-hui LI, Zhi-qi ZHANG, Zhen GUO, Yuan-yuan LUO, Lian-qun ZHOU, Jia YAO. Optimal order polynomial motion profile for high-precision flexible scanning platform[J]. Optics and Precision Engineering, 2021, 29(10): 2400
- Optics and Precision Engineering
- Vol. 29, Issue 10, 2400 (2021)
Fig. 1. Trapezoidal motion profile
Fig. 2. Third order polynomial motion profile
Fig. 3. Fourth order polynomial motion profile
Fig. 4. Simplified model of flexible structure
Fig. 5. （a）Simulation results of residual vibration； （b） Ts 3，Ts 2，Ts 1： settling time of fourth， fifth and sixth order polynomial motion profile； （c） Ts 4： settling time of third order polynomial motion profile； （d） Ts 5： settling time of trapezoidal motion profile
Fig. 6. （a）Relationship between simulation results of residual vibration and segments of curve； （b） Relationship between simulation results of settling time and segments of curve
Fig. 7. Experiment setup of flexible scanning platform
Fig. 8. Results of residual vibration
Fig. 9. [in Chinese]
Fig. 10. [in Chinese]
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Table 1. Simulation Result
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Table 2. Parameters for the experiment setup
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Table 3. Result of vibration acceleration peak and settling time
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