To solve the problems of large computational capacity requirement, high residual vibration, and long settling time when a high-precision flexible scanning platform moves, by using the existing motion profile model, an optimized order polynomial motion profile model based on the principle of optimized time is proposed. A simplified model of a high-precision flexible scanning platform was established, and residual vibration simulation for motion profiles using different order polynomials was carried out with limitations set on velocity, acceleration, and jerk and its derivative. The optimal polynomial motion profile equation with optimal order polynomial as determined by simulation results was solved, and residual vibration experiments on a high-precision flexible scanning platform were carried out. Compared with the traditional trapezoidal motion profile, for the high-precision flexible scanning platform using the optimal polynomial motion profile, the residual vibration acceleration peak was reduced by 67.91%, and the settling time was reduced by 49.92%. Compared with the conventional third-order polynomial motion profile, for the high-precision flexible scanning platform using the optimal polynomial motion profile, the residual vibration acceleration peak was reduced by 42.94%, and the settling time was reduced by 32.50%. The optimal polynomial motion profile displayed good performance. The optimal polynomial motion profile model proposed in this study can overcome the problems of large computational capacity requirement, high residual vibration, and long settling time in the application of a high-precision flexible scanning platform with the existing motion profile model. These experimental results show that the motion profile model effectively reduces residual vibration and settling time and improves the efficiency and performance of the high-precision flexible scanning platform.