Analysis of optical coupling behavior in two-dimensional implant-defined coherently coupled vertical-cavity surface-emitting laser arrays

Guanzhong Pan; Yiyang Xie; Chen Xu; Yibo Dong; Jun Deng; Hongda Chen; Jie Sun

doi:10.1364/PRJ.6.001048

[1] L. Bao, N.-H. Kim, L. J. Mawst, N. N. Elkin, V. N. Troshchieva, D. V. Vysotsky, A. P. Napartovich. Near-diffraction-limited coherent emission from large aperture antiguided vertical-cavity surface-emitting laser arrays. Appl. Phys. Lett., 84, 320-322(2004).

[2] D. F. Siriani, K. D. Choquette. Electronically controlled two-dimensional steering of in-phase coherently coupled vertical-cavity laser arrays. IEEE Photon. Technol. Lett., 23, 167-169(2011).

[3] M. Xun, C. Xu, Y. Xie, G. Jiang, G. Pan, Y. Dong, H. Chen. Beam steering in highly coherent implant-defined vertical cavity surface emitting laser array. CLEO (2016)(2016).

[4] M. J. Adams, N. Li, B. R. Cemlyn, H. Susanto, I. D. Henning. Effects of detuning, gain-guiding, and index antiguiding on the dynamics of two laterally coupled semiconductor lasers. Phys. Rev. A, 95, 053869(2017).

[5] S. T. M. Fryslie, Z. Gao, H. Dave, B. J. Thompson, K. Lakomy, S. Lin, P. J. Decker, D. K. McElfresh, J. E. Schutt-Aine, K. D. Choquette. Modulation of coherently coupled phased photonic crystal vertical cavity laser arrays. IEEE J. Sel. Top. Quantum Electron., 23, 1700409(2017).

[6] H. Yoo, A. Scherer, J. P. Harbison, L. T. Florez, E. G. Paek, B. P. Van der Gaag, J. R. Hayes, A. Von Lehmen, E. Kapon, Y. Kwon. Fabrication of a two‐dimensional phased array of vertical‐cavity surface‐emitting lasers. Appl. Phys. Lett., 56, 1198-1200(1990).

[7] M. Orenstein, E. Kapon, N. G. Stoffel, J. P. Harbison, L. T. Florez, J. Wullert. Two-dimensional phase-locked arrays of vertical-cavity semiconductor lasers by mirror reflectivity modulation. Appl. Phys. Lett., 58, 804-806(1991).

[8] M. E. Warren, P. L. Gourley, G. R. Hadley, G. A. Vawter, T. M. Brennan, B. E. Hammons, K. L. Lear. On-axis far-field emission from two-dimensional phase-locked vertical cavity surface-emitting laser arrays with an integrated phase-corrector. Appl. Phys. Lett., 61, 1484-1486(1992).

[9] D. Zhou, L. J. Mawst, Z. Dai. Modal properties of two-dimensional antiguided vertical-cavity surface-emitting laser arrays. IEEE J. Quantum Electron., 38, 652-664(2002).

[10] L. Bao, N.-H. Kim, L. J. Mawst, N. N. Elkin, V. N. Troshchieva, D. V. Vysotsky, A. P. Napartovich. Modeling, fabrication, and characterization of large aperture two-dimensional antiguided vertical-cavity surface-emitting laser arrays. IEEE J. Sel. Top. Quantum Electron., 11, 968-981(2005).

[11] A. C. Lehman, K. D. Choquette. One- and two-dimensional coherently coupled implant-defined vertical-cavity laser arrays. IEEE Photon. Technol. Lett., 19, 1421-1423(2007).

[12] M.-M. Mao, C. Xu, Q. Kan, Y.-Y. Xie, M. Xun, K. Xu, J.-C. Liu, H.-Q. Ren, H.-D. Chen. High beam quality of in-phase coherent coupling 2-D VCSEL arrays based on proton-implantation. IEEE Photon. Technol. Lett., 26, 395-397(2014).

[13] M. Xun, C. Xu, J. Deng, Y. Xie, G. Jiang, J. Wang, K. Xu, H. Chen. Wide operation range in-phase coherently coupled vertical cavity surface emitting laser array based on proton implantation. Opt. Lett., 40, 2349-2352(2015).

[14] G. Pan, Y. Xie, C. Xu, M. Xun, Y. Dong, J. Deng, J. Sun. Large-scale proton-implant-defined VCSEL arrays with narrow beamwidth. IEEE Electron Device Lett., 39, 390-393(2018).

[15] D. F. Siriani, K. D. Choquette. Implant defined anti-guided vertical-cavity surface-emitting laser arrays. IEEE J. Quantum Electron., 47, 160-164(2011).

[16] M. Xun, C. Xu, Y. Y. Xie, J. Deng, K. Xu, H. D. Chen. Modal properties of 2-D implant-defined coherently coupled vertical-cavity surface-emitting laser array. IEEE J. Quantum Electron., 51, 2600106(2015).

[17] D. F. Siriani, K. D. Choquette. In-phase, coherent photonic crystal vertical-cavity surface-emitting laser arrays with low divergence. Electron. Lett., 46, 712-714(2010).

[18] M. T. Johnson, D. F. Siriani, M. P. Tan, K. D. Choquette. High-speed beam steering with phased vertical cavity laser arrays. IEEE J. Sel. Top. Quantum Electron., 19, 1701006(2013).

[19] M. T. Johnson, D. F. Siriani, J. D. Sulkin, K. D. Choquette. Phase and coherence extraction from a phased vertical cavity laser array. Appl. Phys. Lett., 101, 031116(2012).

[20] G. Pan, Y. Xie, C. Xu, M. Xun, Y. Dong, J. Deng, H. Chen, J. Sun. Dependence of beam quality on optical intensity asymmetry in in-phase coherently coupled VCSEL array. IEEE J. Quantum Electron., 54, 2400306(2018).