Fig. 1. Spectrum of optical frequency comb光频梳频谱
Fig. 2. (a) Principle of frequency domain interference method; (b) the experimental setup of the measurement system(a)频域干涉法原理图; (b) 测距系统实物图
Fig. 3. Relationship between actual distance and measured distance实测距离与被测距离关系
Fig. 4. Broadening of the pulse envelope using original FFT: (a)
; (b)
.
传统FFT法脉冲包络展宽现象 (a)
; (b)
Fig. 5. Principle of equal frequency interval resampling等频率间隔重采样原理
Fig. 6. Repetition and hopping of the measurement result传统FFT法结果重复和跳变
Fig. 7. Comparison of simulation effect when τ = 3 × 10–11: (a) Equal frequency interval resampling; (b) peak position fitting
当τ = 3 × 10–11时, 仿真效果对比 (a) 等频率间隔重采样; (b) 峰值位置拟合
Fig. 8. Peak position fitting simulation. Original FFT: (a) 3.335 × 10–12, (b) 3.335 × 10–11, (c) 7.500 × 10–11. Equal frequency interval resampling and peak position fitting (d) 3.335 × 10–12, (e) 3.335 × 10–11, (f) 7.500 × 10–11峰值定位仿真传统FFT (a) 3.335 × 10–12, (b) 3.335 × 10–11, (c) 7.500 × 10–11; 等频率间隔重采样和峰值位置拟合(d) 3.335 × 10–12, (e) 3.335 × 10–11, (f) 7.500 × 10–11
Fig. 9. Simulation error of three methods传统FFT、等频率间隔重采样和峰值位置拟合法仿真误差比较
Fig. 10. Effect contrast of peak position fitting. Original FFT: (a) L = 5.8600 mm, (b) L = 16.9850 mm, (c) L= 27.9100 mm. Equal frequency interval resampling and peak position fitting: (d) L = 5.8600 mm, (e) L = 16.9850 mm, (f) L = 27.9100 mm
峰值定位效果对比仅传统FFT (a) L = 5.8600 mm, (b) L = 16.9850 mm, (c) L = 27.9100 mm; 等频率间隔重采样和峰值位置拟合(d) L = 5.8600 mm, (e) L = 16.9850 mm, (f) L = 27.9100 mm
Fig. 11. Correction of repetition result by three methods: (a) 0.4997 mm; (b) 0.9998 mm; (c) 4.9980 mm传统FFT、等频率间隔重采样和峰值位置拟合法分辨力修正效果对比 (a) 0.4997 mm; (b) 0.9998 mm; (c) 4.9980 mm
实验序号 | L/mm
| 传统FFT法误差/μm | 等频率间隔重采样误差/μm | 峰值拟合误差/μm | 1 | 0.5250 | 9.1031 | 2.8944 | 0.161990 | 2 | 0.8250 | 21.1607 | 2.8344 | 0.165549 | 3 | 0.9000 | 24.1751 | –0.1799 | 0.010804 | 4 | 1.0005 | 28.6943 | –4.6991 | –0.166222 | 5 | 1.2000 | 36.2327 | –0.239 | 0.000102 | 6 | 1.5000 | 36.2927 | –0.2999 | –0.008146 | 7 | 1.9950 | 51.3887 | –3.3983 | –0.183495 | 8 | 3.0000 | 84.5830 | –0.5998 | –0.038114 | 9 | 4.9950 | 135.9718 | –3.998 | –0.177303 | 10 | 7.0050 | 190.3629 | 1.5986 | 0.114618 |
|
Table 1. Simulation error comparison of three methods.
传统FFT、等频率间隔重采样和峰值位置拟合法仿真结果误差比较
实验序号 | L/mm
| 传统FFT法误差/μm | 等频率间隔重采样误差/μm | 峰值拟合误差/μm | 1 | 0.0023 | –2.3015 | 1.6570 | 0.0218 | 2 | 0.0037 | –3.6001 | 3.0337 | –0.7335 | 3 | 0.1000 | 3.2167 | 0.1031 | 0.8437 | 4 | 0.4997 | –1.8309 | 0.4975 | 0.2267 | 5 | 0.9998 | 2.0097 | 1.0011 | –0.9828 | 6 | 3.1307 | –4.2793 | 3.1336 | 1.1003 | 7 | 4.9980 | –13.2375 | 4.9995 | –0.1739 | 8 | 6.2364 | 157.3300 | 6.2308 | –1.9198 | 9 | 6.2511 | 无法定位 | 6.2551 | –2.9791 | 10 | 9.3629 | 无法定位 | 1.5705 | –2.1087 |
|
Table 2. Measurement results of different distance.
传统FFT、等频率间隔重采样和峰值位置拟合法误差比较