[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 8 >Issue 3 >Page 50 > Article

Chinese Journal of Lasers
Vol. 8, Issue 3, 50 (1981)

[in Chinese]

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article Set citation alerts

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Chinese Journal of Lasers, 1981, 8(3): 50 Copy Citation Text

show less

Abstract

The experimental research on spectral tuning of ArF excimer laser is reported. Frequency tuning for the UV-preionized discharge ArF excimer laser has been performed by using a simple two-prism arrangement.The tunable range is 1926 A~1944A, and the linewidth is about 0.9 A.

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Chinese Journal of Lasers, 1981, 8(3): 50

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information