• Laser & Optoelectronics Progress
  • Vol. 60, Issue 8, 0811032 (2023)
Chenxuan Yin1、2, Yunfeng Ma1、2、*, Wang Cheng1, Guangyan Guo1, Xuebo Yang1, Fang Bai1, Can Cao1, Jiawei Zhou3, Lü Weizhi1、2, Yongjian Zhu1、2, Lifen Liao1, and Zhongwei Fan1
Author Affiliations
  • 1Department of Optical Engineering Research, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100094, China
  • 3College of Optical and Electronic Technology, China Jiliang University, Hangzhou 310018, Zhejiang, China
  • show less
    DOI: 10.3788/LOP222777 Cite this Article Set citation alerts
    Chenxuan Yin, Yunfeng Ma, Wang Cheng, Guangyan Guo, Xuebo Yang, Fang Bai, Can Cao, Jiawei Zhou, Lü Weizhi, Yongjian Zhu, Lifen Liao, Zhongwei Fan. 3D Surface Reconstruction of Laser Damage of Optical Element Based on Wavelet Transform[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811032 Copy Citation Text show less
    Experimental setup for micro imaging on-line detection
    Fig. 1. Experimental setup for micro imaging on-line detection
    Picture of an image acquisition part
    Fig. 2. Picture of an image acquisition part
    Principle of three level decomposition
    Fig. 3. Principle of three level decomposition
    Flow chart of the proposed reconstruction algorithm
    Fig. 4. Flow chart of the proposed reconstruction algorithm
    Image sequence. (a) The 1st image; (b) the 10th image; (c) the 20th image; (d) the 31st image; (e) the 40th image
    Fig. 5. Image sequence. (a) The 1st image; (b) the 10th image; (c) the 20th image; (d) the 31st image; (e) the 40th image
    Curves of focus evaluation functions
    Fig. 6. Curves of focus evaluation functions
    Damage morphology of the sample. (a) Focus on the top; (b) focus on the bottom
    Fig. 7. Damage morphology of the sample. (a) Focus on the top; (b) focus on the bottom
    Top view of 3D point cloud map. (a) Brenner; (b) Tenengrad; (c) Eav; (d) Variance; (e) Energy; (f) Wave1; (g) Wave2; (h) Wave3; (i) Wave3D
    Fig. 8. Top view of 3D point cloud map. (a) Brenner; (b) Tenengrad; (c) Eav; (d) Variance; (e) Energy; (f) Wave1; (g) Wave2; (h) Wave3; (i) Wave3D
    Comparison of reconstruction results. (a) Brenner; (b) Tenengrad; (c) Eav; (d) Variance; (e) Energy; (f) Wave1; (g) Wave2; (h) Wave3; (i) Wave3D
    Fig. 9. Comparison of reconstruction results. (a) Brenner; (b) Tenengrad; (c) Eav; (d) Variance; (e) Energy; (f) Wave1; (g) Wave2; (h) Wave3; (i) Wave3D
    AlgorithmQRQFQS
    FBrenner2.1100.3400.080
    FTenengrad1.9530.3380.060
    FEav1.7510.3280.049
    FVariance1.4190.3050.061
    FEnergy2.5500.3510.117
    FWave11.7460.3300.044
    FWave21.7770.3320.042
    FWave32.5630.3460.116
    FWave3D2.6080.3560.131
    Table 1. Performance index of the focus evaluation function
    AlgorithmDepth /μmError /%
    FBrenner191.714.56
    FTenengrad192.214.95
    FEav190.714.06
    FVariance193.115.49
    FEnergy193.815.91
    FWave1186.811.72
    FWave2187.612.20
    FWave3162.03.11
    FWave3D169.81.56
    Table 2. Calculation results of maximum depth
    Chenxuan Yin, Yunfeng Ma, Wang Cheng, Guangyan Guo, Xuebo Yang, Fang Bai, Can Cao, Jiawei Zhou, Lü Weizhi, Yongjian Zhu, Lifen Liao, Zhongwei Fan. 3D Surface Reconstruction of Laser Damage of Optical Element Based on Wavelet Transform[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811032
    Download Citation