[1] Manalis S R, Minne S C, Quate C F. Two-dimensional micromechanical bimorph arrays for detection of thermal radiation. Appl. Phys. Lett., 1997, 70(24):3311~3313
[2] Perazzo T, Mao M, Kwon O et al.. Infrared vision using uncooled micro-optomechanical camera. Appl. Phys. Lett., 1999, 74(23): 3567~3569
[5] Wood R A. Uncooled infrared imaging arrays and systems: Monolithic silicon microbolometer arrays. Semiconductors and Semimetals, 1997, 47: 47~50
[6] Gabrielson T B. Mechanical-thermal noise in micromachined acoustic and vibration sensors. IEEE Transactions on Electron Devices, 1993, 40: 903~909
[7] Kruse P R. Uncooled infrared imaging arrays and systems: Principles of uncooled infrared focal plane arrays. Semiconductors and Semimetals, 1997, 47: 31~33