Xin Huang, Qinghua Meng, Kezhi Zhang, Fuxian He, Xuheng Lu, Ruiyang Wang, Liu Tang, Zhefeng Wu. Research Progress of Micro Fabry-Perot Cavity Tunable Filter[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1100005
- Laser & Optoelectronics Progress
- Vol. 59, Issue 11, 1100005 (2022)
![Principle and output characteristics of the F-P cavity. (a) Working principle of the F-P cavity; (b) output characteristics of the F-P cavity[7]](/richHtml/lop/2022/59/11/1100005/img_01.jpg)
Fig. 1. Principle and output characteristics of the F-P cavity. (a) Working principle of the F-P cavity; (b) output characteristics of the F-P cavity[7]
![Schematic diagram of the bulk micro-machined filter[8]](/richHtml/lop/2022/59/11/1100005/img_02.jpg)
Fig. 2. Schematic diagram of the bulk micro-machined filter[8]
![Schematic diagram of surface micro-machined filter[8]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Schematic diagram of surface micro-machined filter[8]
Fig. 4. Structure of the DBR[12]
Fig. 5. Schematic diagram of MEMS FPTF for adaptive multispectral thermal imaging[13]
Fig. 6. Cross-sectional of MEMS FPTF used for hyperspectral imaging air spacer[14]
Fig. 7. Cross-sectional views of single- and double-membrane FPIs. (a) Cross-sectional view of single-membrane FPI; (b) cross-sectional view of double-membrane FP[15]
Fig. 8. Cross-sectional of 900-1650 nm broadband MEMS FPTF[16]
Fig. 9. F-P filter with sub-wavelength structure mirror[22]
Fig. 10. Cross-sectional schematic diagram of MEMS FPTF[17]
Fig. 11. Sectional view of tunable dual-frequency MEMS F-P filter[23]
Fig. 12. Equipment of an IR gas analyzer with µFPF[25]
Fig. 13. Schematic diagram of the new μFP filter chip design[26]
Fig. 14. Overall structure of the MEMS FPI device[29]
Fig. 15. Microstructure diagram of the reflector[30]
Fig. 16. Monolithically integrated FPI on photodiode[31]
Fig. 17. Structure of the polysilicon-silicon nitride release Bragg reflector[33]
Fig. 18. Structure of the MEMS Fabry-Perot interferometer[35]
Fig. 19. Structure of MEMS FPI mirror and actuator electrodes[36]
Fig. 20. Electron micrographs of F-P based devices[8]
Fig. 21. Schematic diagram of simplified MEMS tunable F-P interferometer filter structure[40]
Fig. 22. Schematic diagram of MEMS F-P filter[41]
Fig. 23. Microbridge structure diagram. (a) X-arm structure; (b) +circular-arm structure; (c) L-arm structure[44]
Fig. 24. Structural of four bridge decks. (a) Holeless bridge deck; (b) round hole bridge deck; (c) square hole bridge deck;(d) diamond-hole bridge deck[45]
|
Table 1. Characteristics and design of bulk micro-machined and surface micro-machined filters[8]
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20