Yanyan Liu, Lei Liu, Xueqiang Liu, Yantao Wang, Xin Zhang, Mingjun Wang, Yuefeng Qi. Sensitivity Improvement of Fabry-Perot Sensor Based on Vernier Effect[J]. Acta Optica Sinica, 2019, 39(4): 0428001
- Acta Optica Sinica
- Vol. 39, Issue 4, 0428001 (2019)
Fig. 1. Single F-P interference structure
Fig. 2. Separation type double F-P cavity sensitizing structure
Fig. 3. Interference superposition spectra of simulation. (a) Interference spectrum; (b) envelope of spectrum
Fig. 4. Comparison of interference spectra of simulation before and after sensitization. (a) Single cavity interference; (b) double cavity interference
Fig. 5. Interference spectra of double cavity with variable length. (a) 0.2 μm growth of single cavity; (b) 0.2 μm growth of double cavity; (c) interference envelopes of 0.2 μm growth of double cavity
Fig. 6. Contrast of spectra between initial state and 0.5 MPa. (a) Single F-P cavity; (b) separation type F-P sensitizing structure
Fig. 7. Comparison of interference spectra under different pressures. (a) Interference spectra of single F-P cavity; (b) interference spectra of double cavity structure; (c) peak wavelength fitting curve of single F-P cavity; (d) peak wavelength fitting curve of double cavity structure
Fig. 8. Comparison of interference spectra under different temperatures. (a) Interference spectra of single F-P cavity; (b) interference spectra of double cavity structure; (c) peak wavelength fitting curve of single F-P cavity; (d) peak wavelength fitting curve of double cavity structure
Fig. 9. Effect of temperature cross sensitivity on spectra. (a) Interference spectra at 35 ℃ and 50 ℃; (b) peak wavelength versus temperature
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