Micro-optical technology and its developmen

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 30 >Issue 4 >Page 235 > Article

Infrared and Laser Engineering
Vol. 30, Issue 4, 235 (2001)

Micro-optical technology and its developmen

[in Chinese]^*, [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Micro-optical technology and its developmen[J]. Infrared and Laser Engineering, 2001, 30(4): 235 Copy Citation Text

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References

[1] Parriaux O M. Microoptical Technologies for Measurement, Sensors, and Microsystems[A]. SPIE[C]. 1997, 3099.33-57.

[2] Feldman M R. Microoptics Integration and Assembles[A]. SPIE[C]. 1998, 3289.9-72.

[3] ManZ A, Becker H. Microsystem Technology in Chemistry and Life Sciences[M]. Springer. 1999. 10-30.

[in Chinese], [in Chinese], [in Chinese]. Micro-optical technology and its developmen[J]. Infrared and Laser Engineering, 2001, 30(4): 235

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