Ping Li, Wei Han, Wei Wang, Huaiting Jia, Wanqing Huang, Fang Wang, Lidan Zhou, Bin Feng, Qihua Zhu, Wanguo Zheng. Defect Inspection by Band-Pass Imaging Related to Hot Image Property[J]. Acta Optica Sinica, 2017, 37(9): 0914004
- Acta Optica Sinica
- Vol. 37, Issue 9, 0914004 (2017)
Fig. 1. Principle diagram of hot image formation
Fig. 2. Distribution of phase defect
Fig. 3. Spatial distribution of beam with defect point. (a) Intensity on beam propagation axis (b) intensity on hot image screen; (c) intensity on hot image screen with a shadow in nonlinear medium
Fig. 4. Optical schematic of band-pass imaging
Fig. 5. Spatial frequency spectra of 16 phase defects
Fig. 6. Three optical types applied to calculate the hot image intensity. (a) Optical type 1; (b) optical type 2; (c) optical type 3
Fig. 7. Linear fitting of hot image relative intensity and relative brightness of defect filtered by band-pass window function in type 1
Fig. 8. Linear fitting of hot image relative intensity and relative brightness with the optimal band-pass window for the different optical types. (a) Optical type 1; (b) optical type 2; (c) optical type 3
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Table 1. Relationship between the band-pass filter parameters and hot image intensity of 16 phase defects
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Table 2. Correlation coefficients of hot image relative intensity with the band-pass image relative brightness
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