• Chinese Journal of Lasers
  • Vol. 46, Issue 2, 0204001 (2019)
Wentao Zhang1、*, Hao Du1、2, Xianming Xiong1, Renbiao Xie2, and Xianying Wang2
Author Affiliations
  • 1 Guilin University of Electronic Technology, Guilin, Guangxi 541004, China
  • 2 Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China
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    DOI: 10.3788/CJL201946.0204001 Cite this Article Set citation alerts
    Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001 Copy Citation Text show less
    References
    Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001
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