Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001
- Chinese Journal of Lasers
- Vol. 46, Issue 2, 0204001 (2019)
Fig. 1. Measuring principle of 2D grating system
Fig. 2. Motion stage servo control system
Fig. 3. Flow chart of simulation
Fig. 4. Structural sketch of simulation platform
Fig. 5. Hardware-in-the-loop simulation platform
Fig. 6. Schematic of laser beam incident angle
Fig. 7. Displacement schematic of motion stage
Fig. 8. Model-in-the-loop simulation results. (a) X-axis model error; (b) Y-axis model error; (c) Rz-axis model error
Fig. 9. Hardware-in-the-loop simulation results. (a) X-axis model error; (b) Y-axis model error; (c) Rz-axis model error
Fig. 10. Comparison of model-in-the-loop and hardware-in-the-loop simulation results. (a) X-axis error; (b) Y-axis error; (c) Rz-axis error
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Table 1. Model operation process schedule
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