• Infrared and Laser Engineering
  • Vol. 46, Issue 11, 1118003 (2017)
Li Meixuan1、2、*, Wang Li1, Dong Lianhe1, and Zhao Ying2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3788/irla201746.1118003 Cite this Article
    Li Meixuan, Wang Li, Dong Lianhe, Zhao Ying. Application of aspheric technique in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2017, 46(11): 1118003 Copy Citation Text show less
    References

    [1] Hu Dejin. Precision grinding and adaptive control method for hard and brittle aspheric optical mirror[J]. Acta Optica Sinica, 2016, 36(7): 0722004. (in Chinese)

    [2] Pang Zhihai, Fan Xuewu, Ma Zhen, et al. Free-form optical elements corrected aberrations of optical system[J]. Acta Optica Sinica, 2016, 36(5): 0522001. (in Chinese)

    [3] Li Xuyu, Wei Chaoyang, Xu Wendong, et al. Tool influence function in aspheric polishing under dynamic pressure distribution[J]. Opt Precision Eng, 2016, 24(12): 3061-3067. (in Chinese)

    [4] Fan Xiaoming, Luo Cijin, Xu Xueke, et al. Compensation of astigmatism in coordinate measurement for optical aspheric elements[J]. Opt Precision Eng, 2016, 24(12): 3012-3019. (in Chinese)

    [5] Fan Zengming, Li Zhou, Qian Lixun. Aspherical lens laser beam shaping system[J]. Infrared and Laser Engineering, 2012, 41(2): 353-357. (in Chinese)

    [6] Wang Honghao, Ming Ming, Lv Tianyu, et al. Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching[J]. Infrared and Laser Engineering, 2016, 45(4): 0417001. (in Chinese)

    [7] Bai Yu, Liao Zhiyuan, Liao Sheng, et al. Infrared dual band athermal optical system with common aperture[J]. Opt Precision Eng, 2016, 24(2): 268-277. (in Chinese)

    [8] Bai Yu, Liao Zhiyuan, Li Hua, et al. Design and analyse on catadioptric MWIR athermal imaging system[J]. Infrared and Laser Engineering, 2015, 44(2): 407-412. (in Chinese)

    [9] Forbes G W. Robust, efficient computational methods for axially symmetric optical aspheres[J]. Opt Express, 2010, 18(19): 19700-19712.

    [10] Zhang L, Liu D, Shi T, et al. Practical and accurate method for aspheric misalignment aberrations calibration in non-nullinterferometric testing[J]. Applied Opitcs, 2013, 52(35): 8501-8511.

    [11] Michael M Pfeffer, Hochschule. Aspheric optics-from design to manufacturing andaspheric metrology[J]. Adv Opt Techn, 2016, 5(3): 199-200.

    [12] Qin Hua, Feng Dongtai, Ge Shuoshuo. Optical design of build-up aspherical solar concentrating mirror[J]. Chinese Optics, 2014, 7(5): 844-854. (in Chinese)

    CLP Journals

    [1] Yao Hu, Xin Tao, Qun Hao. Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220497

    [2] Chenyang Lv, Renjun Zhan, Ying Cui. Collimating lens design and aspheric optimization method of laser cauterization gun[J]. Infrared and Laser Engineering, 2021, 50(3): 20200219

    Li Meixuan, Wang Li, Dong Lianhe, Zhao Ying. Application of aspheric technique in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2017, 46(11): 1118003
    Download Citation