Shanshan Gu, Yu Guo, Yuan Ju, Mingxu Piao, Yang Wang, Xiyuan Zhang. Design of Optical Quality Detection System for Four-quadrant Detector Lens[J]. Acta Optica Sinica, 2022, 42(2): 0222001
- Acta Optica Sinica
- Vol. 42, Issue 2, 0222001 (2022)
Fig. 1. Basic principle diagram of optical quality detection system
Fig. 2. Optical structure diagram of shaping beam extension collimating lens
Fig. 3. Energy distribution of incoming and outgoing light of shaping beam expansion collimating lens. (a) Input light energy distribution diagram; (b) output light energy distribution diagram
Fig. 4. Optical system of four-quadrant detector lens
Fig. 5. Spot footprint diagram
Fig. 6. Initial structure diagram[17]. (a) Initial structure diagram of tube lens; (b) initial structure diagram of infinity microscopic objective lens
Fig. 7. Optical structure diagram of microscope objective
Fig. 8. MTF curves of microscope lens
Fig. 9. Image quality evaluation of microscopic objective optical system. (a) Distortion; (b) relative illumination
Fig. 10. Lightpath structure of four-quadrant detector lens optical quality inspection device at different rotation angles. (a) 0°; (b) 8°; (c) 12°
Fig. 11. Spot energy diagram of module after rotating at different angles. (a) 0°; (b) 8°; (c) 12°
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Table 1. Tolerance setting for shaping beam extension collimating system
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Table 2. Design parameters of microscopic objective lens
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Table 3. Tolerance setting of microscopic objective system
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