Design of temperature control system of excimer laser

Mingqing HU; Xiaoquan HAN; Yi ZHOU; Zebin FENG; Weihu ZHOU; Lujun BAI

doi:10.3969/j.issn.1007-5461.2015.04.008

Journals >Chinese Journal of Quantum Electronics >Volume 32 >Issue 4 >Page 431 > Article

Chinese Journal of Quantum Electronics
Vol. 32, Issue 4, 431 (2015)

Design of temperature control system of excimer laser

Mingqing HU^1、2、*, Xiaoquan HAN², Yi ZHOU², Zebin FENG², Weihu ZHOU^1、2, and Lujun BAI²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1007-5461.2015.04.008 Cite this Article

HU Mingqing, HAN Xiaoquan, ZHOU Yi, FENG Zebin, ZHOU Weihu, BAI Lujun. Design of temperature control system of excimer laser[J]. Chinese Journal of Quantum Electronics, 2015, 32(4): 431 Copy Citation Text

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References

[1] Richard C, Robert A, Dmitry Berger, et al. Gas discharge laser with gas temperature control[P]. 2000.

[2] Hattori, Osamu, Nikon Corporation. Laser beam control for an exposure apparatus[P]. 2004.

[9] Hao Yuxiang, Yang Xiaoping, et al. An improved expert intelligent PID algorithm in AQM network[C]. Computer, Mechatronics, Control and Electronic Engineering (CMCE), 2010, 234.

[11] Xia Anjun, Xu Hao, Hu Shuju, et al. Pitch control of large scale wind turbine based on expert PID control[C]. Electronics, Communications and Control (ICECC), 2011 International Conference on IEEE[M]. 2011: 3836-3839.

HU Mingqing, HAN Xiaoquan, ZHOU Yi, FENG Zebin, ZHOU Weihu, BAI Lujun. Design of temperature control system of excimer laser[J]. Chinese Journal of Quantum Electronics, 2015, 32(4): 431

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