Fanyan Zeng, Guangfu Zhou, You Wang, Chaofan Yan, Yutang Dai. Experimental Study on Femtosecond Laser Cutting Quartz Devices with Complex Shapes[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0714002
- Laser & Optoelectronics Progress
- Vol. 60, Issue 7, 0714002 (2023)
Fig. 1. Photograph of the femtosecond laser processing system
Fig. 2. Relationship between maximum energy density and ablation aperture square at different repetition frequencies
Fig. 3. Morphologies of quartz cutting groove surface under different laser single pulse energies. (a) Ep=11.8 μJ; (b) Ep=35.4 μJ
Fig. 4. Depth and width of quartz cutting micro groove under different laser energies
Fig. 5. Design and cutting results of quartz resonant device. (a) Resonant device design drawing; (b) initial trial machining of workpieces; (c) separating devices after processing and cleaning
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Table 1. Relationship among actual spot size, damage threshold, and minimum etching energy
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