• Acta Optica Sinica
  • Vol. 34, Issue 2, 231003 (2014)
Liu Junlin*, Xiong Chuanbing, Cheng Haiying, Zhang Jianli, Mao Qinghua, Wu Xiaoming, Quan Zhijue, Wang Xiaolan, Wang Guangxu, Mo Chunlan, and Jiang Fengyi
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/aos201434.0231003 Cite this Article Set citation alerts
    Liu Junlin, Xiong Chuanbing, Cheng Haiying, Zhang Jianli, Mao Qinghua, Wu Xiaoming, Quan Zhijue, Wang Xiaolan, Wang Guangxu, Mo Chunlan, Jiang Fengyi. Effects of AlN Interlayer on Growth of GaN Films on Silicon Substrate[J]. Acta Optica Sinica, 2014, 34(2): 231003 Copy Citation Text show less
    References

    [1] D Zhu, C McAleese, K K McLaughlin, et al.. GaN-based LEDs grown on 6-inch diameter Si (111) substrates by MOVPE [C]. SPIE, 2009, 7231: 723118.

    [2] A Dadgar, M Poschenrieder, J Blsing, et al.. Thick, crack-free blue light-emitting diodes on Si (111) using low-temperature AlN interlayers and in situ SixNy masking [J]. Appl Phys Lett, 2002, 80(20): 3670-3672.

    [3] M Kim, Y Do, H Kang, et al.. Effects of step-graded AlxGa1-xN interlayer on properties of GaN grown on Si (111) using ultrahigh vacuum chemical vapor deposition [J]. Appl Phys Lett, 2001, 79(17): 2713-2715.

    [4] K Cheng, M Leys, S Degroote, et al.. Flat GaN epitaxial layers grown on Si (111) by metalorganic vapor phase epitaxy using step-graded AlGaN intermediate layers [J]. J Electronic Materials, 2006, 35(4): 592-598.

    [5] A Dadgar, A Alam, T Riemann, et al.. Crack-free InGaN/GaN light emitters on Si (111) [J]. Physica Status Solidi A, 2001, 188(1): 155-158.

    [6] S Zamir, B Meyler, J Salzman. Thermal microcrack distribution control in GaN layers on Si substrates by lateral confined epitaxy [J]. Appl Phys Lett, 2001, 78(3): 288-290.

    [7] Y Honda, Y Kuroiwa, M Kawaguchi, et al.. Growth of GaN free from cracks on a (111) Si substrate by selective metalorganic vapor-phase epitaxy [J]. Appl Phys Lett, 2002, 80(2): 222-224.

    [8] J L Liu, F F Feng, Y H Zhou, et al.. Stability of Al/Ti/Au contacts to N-polar n-GaN of GaN based vertical light emitting diode on silicon substrate [J]. Appl Phys Lett, 2011, 99(11): 111112.

    [9] C L Mo, W Q Fang, Y Pu, et al.. Growth and characterization of InGaN blue LED structure on Si(111) by MOCVD [J]. J Crystal Growth, 2005, 285(3): 312-317.

    [10] J L Liu, J L Zhang, Q H Mao, et al.. Effects of AlN interlayer on growth of GaN-based LED on patterned silicon substrate [J]. Cryst Eng Comm, 2013, 15(17): 3372-3376.

    [11] Feng Feifei, Liu Junlin, Qiu Chong, et al.. N-polar n-type ohmic contact of GaN-based LED on Si substrate [J]. Acta Physica Sinica, 2010, 59(8): 5706-5709.

    [12] Wang Yanming, Xiong Chuanbing, Wang Guangxu, et al.. Study on aging characterizaion of 1 W epitaxy on Si substrate blue LED based on different substrate [J]. Acta Optica Sinica, 2010, 30(6): 1749-1754.

    [13] Lian Ruikai, Li Lin, Fan Yaming, et al.. Effects of AlN buffer layer thickness and Al pre-treatment on properties of GaN/Si (111) epilayer [J]. Chinese J Lasers, 2013, 40(1): 0106001.

    [14] C I Park, J H Kang, K C Kim, et al.. Effect of a buffer layer on GaN growth on a Si(111) substrate with a 3C-SiC intermediater layer [J]. J Korean Physical Society, 2000, 37(6): 1007-1011.

    [15] L S Wang, X L Liu, Y D Zan, et al.. Wurtzite GaN epitaxial growth on a Si(001) substrate using γ-Al2O3 as an intermediate layer [J]. Appl Phys Lett, 1998, 72(1): 109-111.

    [16] H J Scheel. Historical aspects of crystal growth technology [J]. J Crystal Growth, 2000, 211(1-4): 1-12.

    [17] C Kim, I K Robinson, J Myoung, et al.. Critical thickness of GaN thin films on sapphire (0001) [J]. Appl Phys Lett, 1996, 69(16): 2358-2360.

    [18] J Z Domagala, Z R Zytkiewicz, B Beaumont, et al.. X-ray diffraction studies of epitaxial laterally overgrown (ELOG) GaN layers on sapphire substrates [J]. J Crystal Growth, 2002, 245(1-2): 37-49.

    [19] W K Fong, K K Leung, C Surya. Growth and characterization of GaN/InGaN multiple quantum wells on nanoscale epitaxial lateral overgrown layers [J]. Cryst Growth Des, 2011, 11(6): 2091-2097.

    [20] C H Seager, A F Wright, J Yu, et al.. Role of carbon in GaN [J]. J Appl Phys, 2002, 92(11): 6553-6560.

    [21] A Armstrong, A Arehart, B Moran, et al.. Impact of carbon on trap states in n-type GaN grown by metalorganic chemical vapor deposition [J]. Appl Phys Lett, 2004, 84(3): 374-376

    CLP Journals

    [1] Hou Jiahui, He Dafang, Chen Jingjing, Li Chunmei, Cheng Nanpu. First-Principles Study of Electronic Structure and Optical Property of AlN1-xPx Alloys[J]. Acta Optica Sinica, 2017, 37(5): 516002

    [2] Zhong Linjian, Xing Yanhui, Han Jun, Wang Kai, Zhu Qifa, Fan Yaming, Deng Xuguang, Zhang Baoshun. Growth of the C-Doped High Resistance GaN by MOCVD[J]. Chinese Journal of Lasers, 2015, 42(4): 406002

    Liu Junlin, Xiong Chuanbing, Cheng Haiying, Zhang Jianli, Mao Qinghua, Wu Xiaoming, Quan Zhijue, Wang Xiaolan, Wang Guangxu, Mo Chunlan, Jiang Fengyi. Effects of AlN Interlayer on Growth of GaN Films on Silicon Substrate[J]. Acta Optica Sinica, 2014, 34(2): 231003
    Download Citation