Simulation and Analysis of Light Extraction Efficiency of GaN-Based Flip Chip with Sidewall Roughness

Xue Wang; Zhiyong Cui; Bing Wang; Kai Guo; Ruifei Duan; Yiping Zeng; Jinmin Li

doi:10.3788/LOP202158.0723001

[1] Hu T T, Wu J P, Yin H J et al. Biological effects of light-emitting diode light sources and their progress in clinical research[J]. Laser & Optoelectronics Progress, 56, 120003(2019).

[2] Akpınar O, Bilgili A K, Öztürk M K et al. On the elastic properties of INGAN/GAN LED structures[J]. Applied Physics A, 125, 112(2019).

[3] Kashima Y, Maeda N, Matsuura E et al. High external quantum efficiency (10%) AlGaN-based deep-ultraviolet light-emitting diodes achieved by using highly reflective photonic crystal on p-AlGaN contact layer[J]. Applied Physics Express, 11, 012101(2018).

[4] Tian K K, Chu C S, Bi W G et al. Hole injection efficiency improvement for AlGaN-based deep ultraviolet light-emitting diodes‍[J]. Laser & Optoelectronics Progress, 56, 060001(2019).

[5] Zeng Y, Fan X L, Chen J J et al. Preparation of composite micro/nano structure on the silicon surface by reactive ion etching: enhanced anti-reflective and hydrophobic properties‍[J]. Superlattices and Microstructures, 117, 144-154(2018).

[6] Zhang C, Hu J P, Zhou R Y et al. Design and analysis of inverse polarization grating devices for deep ultraviolet light[J]. Chinese Journal of Lasers, 47, 0301005(2020).

[7] Chen X L, Li K, Kong F M et al. Improved the light extraction efficiency of GaN vertical light-emitting diodes using 3D sphere-like arrays[J]. Optical and Quantum Electronics, 47, 2957-2968(2015).

[8] Fu Y G, Ouyang M Z, Wu J S. Anti-reflective micro-nano surface technology based on “moth-eye” inspiration[J]. Flight Control & Detection, 1, 1-10(2018).

[9] Liu S R, Wang L, Sun Y J et al. Enhancement of light extraction efficiency of LED by bionic moth-eye structure with frustum of a cone[J]. Acta Optica Sinica, 38, 0122001(2018).

[10] Fang X M, Jiang X W, Zhao J W. Influence of grating shape on LED light extraction efficiency[J]. Laser & Optoelectronics Progress, 55, 082302(2018).

[11] Li X Y, Zhu L H, Deng B et al. Enhanced light output efficiency of GaN-based light-emitting diodes by sidewall texturing[J]. Journal of Xiamen University (Natural Science), 54, 384-389(2015).

[12] Deng B, Liu B L. Enhancement of photon extraction efficiency of GaN-based LED by lateral surface roughening[J]. Semiconductor Optoelectronics, 32, 352-355(2011).

[13] Lee K H, Park H J, Kim S H et al. Light-extraction efficiency control in AlGaN-based deep-ultraviolet flip-chip light-emitting diodes: a comparison to InGaN-based visible flip-chip light-emitting diodes[J]. Optics Express, 23, 20340-20349(2015).

[14] Che Z, Zhang J, Yu X Y et al. Optimized double-sided hemispherical pattern design on patterned sapphire substrate for flip-chip GaN-based LED[J]. Journal of Applied Optics, 36, 606-611(2015).