• Acta Photonica Sinica
  • Vol. 49, Issue 4, 0412001 (2020)
Xin-jun WAN, Song LÜ, Ke SONG, and Shu-ping XIE
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
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    DOI: 10.3788/gzxb20204904.0412001 Cite this Article
    Xin-jun WAN, Song LÜ, Ke SONG, Shu-ping XIE. A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution[J]. Acta Photonica Sinica, 2020, 49(4): 0412001 Copy Citation Text show less

    Abstract

    A fringe reflection three dimensional (3D) profile measurement system is proposed for micrometer-level height stepped mirrors. A systematic theoretical analysis of fringe reflection ray path is conducted, showing that by proper selection of the structure parameters including the ray incident angle, the Liquid Crystal Display(LCD) screen orientation angle and the LCD screen pixel size, the fringe reflection system can resolve micron and even sub-micron level stepped mirrors. A micrometer-level resolution fringe reflection measurement setup for stepped mirrors is constructed, which calculates the fringe phase using the four-step phase shift method, determines the reflected light equation using the moving screen method and reconstructs the 3D shape based on triangulation method. A stepped mirror sample with 5 μm and 10 μm steps is finally measured. The measurement uncertainty is within 0.5 μm and the discrepancy with the commercial system result is less than 0.5 μm, which proves the feasibility of the designing method. The result of this paper can be of great reference to the 3D reconstruction study of specular surfaces with diffractive structures.