Wang Yu, Zhou Yanping, Li Maolin, Zuo Chao, Yang Bingjun. ICP Etching Process of GaAs/AlGaAs for Vertical-Cavity Surface-Emitting Lasers[J]. Chinese Journal of Lasers, 2020, 47(4): 401005
Copy Citation Text
Wang Yu, Zhou Yanping, Li Maolin, Zuo Chao, Yang Bingjun. ICP Etching Process of GaAs/AlGaAs for Vertical-Cavity Surface-Emitting Lasers[J]. Chinese Journal of Lasers, 2020, 47(4): 401005