• Chinese Journal of Lasers
  • Vol. 47, Issue 4, 401005 (2020)
Wang Yu1,2, Zhou Yanping2,*, Li Maolin2, Zuo Chao2, and Yang Bingjun2
Author Affiliations
  • 1School of Science, Changchun University, Changchun, Jilin 130022, China
  • 2ULVAC Research Center Suzhou Co., Ltd., Suzhou, Jiangsu 215026, China
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    DOI: 10.3788/CJL202047.0401005 Cite this Article Set citation alerts
    Wang Yu, Zhou Yanping, Li Maolin, Zuo Chao, Yang Bingjun. ICP Etching Process of GaAs/AlGaAs for Vertical-Cavity Surface-Emitting Lasers[J]. Chinese Journal of Lasers, 2020, 47(4): 401005 Copy Citation Text show less
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    The article is cited by 3 article(s) CLP online library. (Some content might be in Chinese.)
    Wang Yu, Zhou Yanping, Li Maolin, Zuo Chao, Yang Bingjun. ICP Etching Process of GaAs/AlGaAs for Vertical-Cavity Surface-Emitting Lasers[J]. Chinese Journal of Lasers, 2020, 47(4): 401005
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