• Journal of Infrared and Millimeter Waves
  • Vol. 32, Issue 4, 304 (2013)
YU Jie1、*, WANG Chong1, YANG Zhou1, CHEN Xiao-Shuang2, and YANG Yu1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3724/sp.j.1010.2013.00304 Cite this Article
    YU Jie, WANG Chong, YANG Zhou, CHEN Xiao-Shuang, YANG Yu. Simulation analysis of electrical characteristics of strained SiGe channel-on-insulator p-MOSFET[J]. Journal of Infrared and Millimeter Waves, 2013, 32(4): 304 Copy Citation Text show less

    Abstract

    In this paper, the strained SiGe-on-Insulator (SGOI) p-MOSFET and Si-on-Insulator (SOI) p-MOSFET are respectively studied via 2-D numerical simulation by ISE TCAD software. The results indicate that compared with the conventional SOI p-MOSFET, the drain-source saturation current of SGOI p-MOSFET almost more than twice, the sub-threshold current of SGOI p-MOSFET has 1~3 orders of magnitude higher than that of SOI p-MOSFET. Because Ge alloy mole fraction is an important basic parameter to the strained SiGe channel MOSFET, the effect of Ge alloy mole fraction on the electrical characteristics of the SGOI p-MOSFET is in depth study in this paper. With the increasing of Ge alloy mole fraction, the overall electrical properties of SGOI p-MOSFET are improved.The strained SiGe-on-Insulator (SGOI) p-MOSFET and Si-on-Insulator (SOI) p-MOSFET were studied via 2-D numerical simulation by ISE TCAD software, respectively. The results indicate that the drain-source saturation current of SGOI p-MOSFET is almost more than twice that of conventional SOI p-MOSFET. The sub-threshold current of SGOI p-MOSFET is 1~3 orders of magnitude higher than that of SOI p-MOSFET. Because Ge alloy mole fraction is an important parameter for the strained SiGe channel MOSFET, its effect on the electrical characteristics of the SGOI p-MOSFET was studied in detail. With the increasing of Ge alloy mole fraction, the overall electrical properties of SGOI p-MOSFET were improved.
    YU Jie, WANG Chong, YANG Zhou, CHEN Xiao-Shuang, YANG Yu. Simulation analysis of electrical characteristics of strained SiGe channel-on-insulator p-MOSFET[J]. Journal of Infrared and Millimeter Waves, 2013, 32(4): 304
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