Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating

Junyao Luo; Zhi Guo; Hao Huang; Xin Ou; Xiangzhi Zhang

doi:10.3788/AOS202141.1405001

Journals >Acta Optica Sinica >Volume 41 >Issue 14 >Page 1405001 > Article

Acta Optica Sinica
Vol. 41, Issue 14, 1405001 (2021)

Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating

Junyao Luo^1、2、4, Zhi Guo^1、2、*, Hao Huang^{3、4、5、**}, Xin Ou³, and Xiangzhi Zhang^1、2

Author Affiliations

¹Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China

²Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China

³Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

⁴University of Chinese Academy of Sciences, Beijing 100049, China

⁵ShanghaiTech University, Shanghai 201210, China

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DOI: 10.3788/AOS202141.1405001 Cite this Article Set citation alerts

Junyao Luo, Zhi Guo, Hao Huang, Xin Ou, Xiangzhi Zhang. Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating[J]. Acta Optica Sinica, 2021, 41(14): 1405001 Copy Citation Text

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Junyao Luo, Zhi Guo, Hao Huang, Xin Ou, Xiangzhi Zhang. Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating[J]. Acta Optica Sinica, 2021, 41(14): 1405001

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