• Journal of Infrared and Millimeter Waves
  • Vol. 37, Issue 6, 668 (2018)
HUANG Wen-Chao1, WANG Xiao-Fang2、*, CHEN Xiao-Shuang2, XUE Yu-Xiong1, and YANG Sheng-Sheng1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2018.06.005 Cite this Article
    HUANG Wen-Chao, WANG Xiao-Fang, CHEN Xiao-Shuang, XUE Yu-Xiong, YANG Sheng-Sheng. 2D-carrier profiling in narrow quantum wells by a Schottky’s current transport model based on scanning spreading resistance microscopy[J]. Journal of Infrared and Millimeter Waves, 2018, 37(6): 668 Copy Citation Text show less

    Abstract

    Current studies on the relationship between carrier concentration in nano-scale semiconductor structure and its local conductance is mainly on parameters fitting. For above connection, existing models rely on artificial fitting parameters such as ideal factor. For above reason, derivation of carrier concentration though measured local conductance can not be done. In this work, we present a scheme to obtain the carrier concentration in narrow quantum wells (QWs). Cross-sectional scanning spreading resistance microscopy (SSRM) provides unparalleled spatial resolution (<10 nm, Capable of characterizing single QW layer) in electrical characterization. High-resolution local conductance has been measured by SSRM on molecular beam epitaxy-grown GaAs/AlGaAs QWs cleaved surface (110). Based on our experimental set-up, a model which describes conductance by the only argument, i.e. carrier concentration has been built. Using the model, our implementation derived carrier concentration from SSRM measured local conductance in GaAs/AlGaAs QWs (doping level: 1016/cm3-1018/cm3). Relative errors of the results are within 30%.
    HUANG Wen-Chao, WANG Xiao-Fang, CHEN Xiao-Shuang, XUE Yu-Xiong, YANG Sheng-Sheng. 2D-carrier profiling in narrow quantum wells by a Schottky’s current transport model based on scanning spreading resistance microscopy[J]. Journal of Infrared and Millimeter Waves, 2018, 37(6): 668
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