• Optics and Precision Engineering
  • Vol. 32, Issue 19, 2889 (2024)
Yuqi REN1,3, Yunfan YUE1,3, Sheng LI1,4, Nianyao CHAI1,4..., Xiangyu CHEN1,3, Zhongle ZENG1,4, Fengyi ZHAO2, Huan WANG1,3 and Xuewen WANG1,2,4|Show fewer author(s)
Author Affiliations
  • 1Center of Femtosecond Laser Manufacturing for Advanced Materials and Devices, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan430070, China
  • 2Foshan Xianhu Laboratory, Foshan58000, China
  • 3School of Materials Science and Engineering, Wuhan University of Technology, Wuhan40070, China
  • 4International School of Materials Science and Engineering, Wuhan University of Technology, Wuhan30070, China
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    DOI: 10.37188/OPE.20243219.2889 Cite this Article
    Yuqi REN, Yunfan YUE, Sheng LI, Nianyao CHAI, Xiangyu CHEN, Zhongle ZENG, Fengyi ZHAO, Huan WANG, Xuewen WANG. Femtosecond laser annealing of 4H-SiC interfaces and optimization of their electrical performance[J]. Optics and Precision Engineering, 2024, 32(19): 2889 Copy Citation Text show less

    Abstract

    Enhancing the electrical contact properties between SiC and metal interfaces is crucial for advancing SiC materials in high-frequency and high-power devices. This study utilized a 1030 nm near-infrared femtosecond laser to anneal the 4H-SiC surface, analyzing the effects of various laser annealing parameters. We examined changes in surface morphology, element distribution, and bonding structure of the laser-annealed samples using scanning electron microscopy, X-ray photoelectron spectroscopy, confocal Raman spectroscopy, and other methods. The study revealed that improvements in electrical properties at the contact interface result from a disordered graphite structure and SiOx/Si structure with oxygen vacancies created by laser annealing. This structure reduces the interface Schottky barrier height, enhances conductivity, and shifts the Fermi level of the 4H-SiC surface, significantly boosting interface electrical properties. Femtosecond laser annealing reduced the SiC interface Schottky barrier from 1.43 eV to 0.69 eV and increased the carrier concentration from 5.40×1013 cm-3 to 1.77×1018 cm-3, presenting a novel method for optimizing SiC interface electrical properties with ultrafast laser annealing.
    Yuqi REN, Yunfan YUE, Sheng LI, Nianyao CHAI, Xiangyu CHEN, Zhongle ZENG, Fengyi ZHAO, Huan WANG, Xuewen WANG. Femtosecond laser annealing of 4H-SiC interfaces and optimization of their electrical performance[J]. Optics and Precision Engineering, 2024, 32(19): 2889
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