Yang Shi, Xiang Li, Mingjie Zou, Yu Yu, Xinliang Zhang, "103 GHz germanium-on-silicon photodiode enabled by an optimized U-shaped electrode," Photonics Res. 12, 1 (2024)
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- Photonics Research
- Vol. 12, Issue 1, 1 (2024)
Fig. 1. (a) Structural schematic of the waveguide Ge PD with a U-shaped electrode. The cross section of the silicon waveguide is 500 nm × 220 nm and the silicon taper is 40 μm in length. Al, aluminum; Si, silicon; SiO2, silica. The equivalent circuit is shown including the transit time and RC parasitic parameters. The transit time is represented by the equivalent resistance R t and the equivalent capacitance C t . The RC parasitic parameters contain the junction capacitance C j , series resistance R S , inductance L p , and stray capacitance C p as well as external load R L . (b) The top view of the conventional waveguide Ge PD with the parallel electrode. The dashed region represents R S . (c) The top view of the proposed PD with the U-shaped electrode. (d) The simulated R S versus L Ge under two kinds of contact and corresponding reduction ratio of the series resistance. Reduction ratio = ( R S , Parallel − R S , U -shaped ) / R S , Parallel × 100 % . (e) The simulated bandwidth related to R S and on-electrode inductance L p when C j = 16 fF .
Fig. 2. (a) The cross-section diagram of the PDs along the length direction. Si, silicon. (b) The microscope images of the fabricated PD with the U-shaped electrode. (c) The enlarged view of the active region and U-shaped electrode. (d) The measures I-V characteristics of the two kinds of PDs. (e) The measured photocurrent with the input optical power at − 1 V . (f) The measured normalized S 21 parameters of the PDs with U-shaped and parallel electrodes.
Fig. 3. Measured eye diagrams for 100/112/120 Gb/s OOK signals and 100/112/200 Gb/s PAM4 signals at −1 V.
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Table 1. Extracted Parameters of the Electrical Elements
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Table 2. Literature Overview of the State-of-the-Art High-Speed Waveguide PDs Integrated on Silicona
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