• Laser & Optoelectronics Progress
  • Vol. 57, Issue 23, 230004 (2020)
Yujie Hu1、2, Shuxiao Wang1、2, Dawei Wang1、2, Mingbin Yu1、2, and Yan Cai1、2、*
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/LOP57.230004 Cite this Article Set citation alerts
    Yujie Hu, Shuxiao Wang, Dawei Wang, Mingbin Yu, Yan Cai. Research Progress of Mid-Infrared Micro-Ring Resonator and Its Application[J]. Laser & Optoelectronics Progress, 2020, 57(23): 230004 Copy Citation Text show less
    Micro-ring resonator. (a) All-pass micro-ring resonator[35]; (b) add-drop micro-ring resonator[36]
    Fig. 1. Micro-ring resonator. (a) All-pass micro-ring resonator[35]; (b) add-drop micro-ring resonator[36]
    SEM images of each micro-ring resonator based on different silicon material platforms. (a)-(d) Optical microscope and SEM image of SOS ring resonators[12-14]; (e)(f) optical microscope and SEM image of SOI ring resonators[15-16]; (g)-(j) SEM image of suspended Si ring resonators[17</x
    Fig. 2. SEM images of each micro-ring resonator based on different silicon material platforms. (a)-(d) Optical microscope and SEM image of SOS ring resonators[12-14]; (e)(f) optical microscope and SEM image of SOI ring resonators[15-16]; (g)-(j) SEM image of suspended Si ring resonators[17
    SEM images of each micro-ring resonator based on different material platforms. (a) SEM image of Ge ring resonator based on GeOI material platform[21]; (b) SEM image of GaAs ring resonator on top of a Al0.2Ga0.8As buffer layer[43]; (c)(d) SEM image of Ge ring resonator with air cladding and its quality factor value at operating wavelength[2
    Fig. 3. SEM images of each micro-ring resonator based on different material platforms. (a) SEM image of Ge ring resonator based on GeOI material platform[21]; (b) SEM image of GaAs ring resonator on top of a Al0.2Ga0.8As buffer layer[43]; (c)(d) SEM image of Ge ring resonator with air cladding and its quality factor value at operating wavelength[2
    Chip layout and SEM image of mid-infrared Vernier cascaded micro-ring filter. (a) Chip of two racetrack resonators in a Vernier configuration[25]; (b)(c) SEM and optical microscope images of heating tunable Vernier ring resonator[48]
    Fig. 4. Chip layout and SEM image of mid-infrared Vernier cascaded micro-ring filter. (a) Chip of two racetrack resonators in a Vernier configuration[25]; (b)(c) SEM and optical microscope images of heating tunable Vernier ring resonator[48]
    Schematic of cascaded micro-ring resonator based on Vernier effect for sensing field[47]
    Fig. 5. Schematic of cascaded micro-ring resonator based on Vernier effect for sensing field[47]
    Experimental results. (a) Transmission spectrum of filtering and sensing micro-ring; (b) wavelength shift of transmission spectrum of sensing micro-ring in the presence of detected substance; (c) total transmission spectrum of the cascaded micro-ring resonator based on Vernier effect; (d) wavelength shift of transmission spectrum of cascaded micro-ring resonator in the presence of detected substance
    Fig. 6. Experimental results. (a) Transmission spectrum of filtering and sensing micro-ring; (b) wavelength shift of transmission spectrum of sensing micro-ring in the presence of detected substance; (c) total transmission spectrum of the cascaded micro-ring resonator based on Vernier effect; (d) wavelength shift of transmission spectrum of cascaded micro-ring resonator in the presence of detected substance
    Schematic of optical frequency comb generation based on micro-ring resonator[66]
    Fig. 7. Schematic of optical frequency comb generation based on micro-ring resonator[66]
    Experimental results of mid-infrared Kerr optical frequency comb. (a) Kerr optical frequency comb based on Si3N4 ring resonator[65]; (b) Kerr optical frequency comb based on non-etched silicon ring resonator[15]; (c) coherent mid-infrared optical frequency comb based on four-wave mixing and Raman effect interaction in silicon ring resonator[<xref ref-type="bibr" rid="b32
    Fig. 8. Experimental results of mid-infrared Kerr optical frequency comb. (a) Kerr optical frequency comb based on Si3N4 ring resonator[65]; (b) Kerr optical frequency comb based on non-etched silicon ring resonator[15]; (c) coherent mid-infrared optical frequency comb based on four-wave mixing and Raman effect interaction in silicon ring resonator[Download full size
    Property results of Ge strip waveguide. (a) Schematic of Ge-on-Si strip waveguide; (b) Schematic of Ge strip waveguide mode field(@3.5 μm); (c) dispersion of Ge strip waveguide
    Fig. 9. Property results of Ge strip waveguide. (a) Schematic of Ge-on-Si strip waveguide; (b) Schematic of Ge strip waveguide mode field(@3.5 μm); (c) dispersion of Ge strip waveguide
    Simulation results at 3.5 μm wavelength pump. (a) Input the pump light(@3.5 μm, pump power is 80 mW ); (b) output the Kerr optical frequency comb
    Fig. 10. Simulation results at 3.5 μm wavelength pump. (a) Input the pump light(@3.5 μm, pump power is 80 mW ); (b) output the Kerr optical frequency comb
    Simulation results at 4 μm wavelength pump. (a) Input the pump light(@4 μm, pump power is 112 mW ); (b) output the Kerr optical frequency comb
    Fig. 11. Simulation results at 4 μm wavelength pump. (a) Input the pump light(@4 μm, pump power is 112 mW ); (b) output the Kerr optical frequency comb
    Types of waveguideMaterial platformOperating wavelength λ /μmQReference
    RibSOS5.53000[12]
    StripSOS2.7511400±800[13]
    StripSOS4.4151000[14]
    StripSOI2.6590000[15]
    StripSOI3.81.1×106[16]
    Suspended membraneSOI2.758100[17]
    Suspended membraneSOI3.57900[18]
    5.22700
    Suspended membraneSOI3.7983000[38]
    Suspended membraneSOI216600[19-20]
    StripSilicon on CaF25.262000[39]
    Suspended membraneGeOI2170[21]
    Suspended membraneGeOI2.1557000[22]
    Ribgraded SiGe83200[23]
    RibAlGaAs61900[43]
    Table 1. Performance of ring resonators based on different material platforms
    Yujie Hu, Shuxiao Wang, Dawei Wang, Mingbin Yu, Yan Cai. Research Progress of Mid-Infrared Micro-Ring Resonator and Its Application[J]. Laser & Optoelectronics Progress, 2020, 57(23): 230004
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