• Microelectronics
  • Vol. 53, Issue 4, 735 (2023)
XIE Lingdong1, YANG Shuo2, ZHOU Honghui1, WENG Donglei1, ZHAO Tielin3, JIANG Keruo1, and XU Fan4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.220397 Cite this Article
    XIE Lingdong, YANG Shuo, ZHOU Honghui, WENG Donglei, ZHAO Tielin, JIANG Keruo, XU Fan. Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor[J]. Microelectronics, 2023, 53(4): 735 Copy Citation Text show less

    Abstract

    In order to improve the sensitivity of weak pressure sensors, a pressure sensor with excellent performance was fabricated by using microstructure to produce piezo resistive effect. Three kinds of graphene pressure sensors with different structures were studied. The layout structure, process preparation and material characterization of graphene pressure sensors were designed and studied. Finally, the sensitivity of the three graphene pressure sensors with different structures was tested. The experimental results show that the graphene pressure sensor with network structure has high sensitivity, the sensitivity can reach 0303 kPa-1 at low pressure (0-200 Pa), and the lowest pressure can be detected at 245 Pa. The graphene pressure sensor with network structure is a high performance pressure sensor that can sense weak pressure changes.
    XIE Lingdong, YANG Shuo, ZHOU Honghui, WENG Donglei, ZHAO Tielin, JIANG Keruo, XU Fan. Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor[J]. Microelectronics, 2023, 53(4): 735
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