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    Journals >Optics and Precision Engineering >Volume 15 >Issue 4 >Page 447 > Article
    • Optics and Precision Engineering
    • Vol. 15, Issue 4, 447 (2007)
    Study on dimensional precision of UV-lithography on SU-8 photoresist
    1,2, 1,2, 1,2, 2, and 1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on dimensional precision of UV-lithography on SU-8 photoresist[J]. Optics and Precision Engineering, 2007, 15(4): 447 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on dimensional precision of UV-lithography on SU-8 photoresist[J]. Optics and Precision Engineering, 2007, 15(4): 447
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