Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses

[in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 17 >Issue 4 >Page 385 > Article

Acta Optica Sinica
Vol. 17, Issue 4, 385 (1997)

Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses

[in Chinese] and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese]. Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses[J]. Acta Optica Sinica, 1997, 17(4): 385 Copy Citation Text

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Abstract

We presents a theoretical analysis on a self injected excimer laser (SIEL) with 1～10 ns continuous width tunable pulses output from a typical commercial excimer laser. The operational characteristics and the basic requirements were given. The results agree with the recent published experimental results of SIEL.

Keywords

excimer laser seed pulse self injected

[in Chinese], [in Chinese]. Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses[J]. Acta Optica Sinica, 1997, 17(4): 385

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