Uniformity Analysis for Broad-beam Ion Source

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 29 >Issue 5 >Page 59 > Article

Opto-Electronic Engineering
Vol. 29, Issue 5, 59 (2002)

Uniformity Analysis for Broad-beam Ion Source

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Uniformity Analysis for Broad-beam Ion Source[J]. Opto-Electronic Engineering, 2002, 29(5): 59 Copy Citation Text

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References

[1] Mickelsen W R, Kaufman H R. Electrostatic thrusters for space propulsion, present and future[J]. J.Br.Interplanet.Soc, 1964, 19: 319-337.

[2] Kaufman H R. Broad-beam ion sources: Present status and future directions[J]. J.Vac.Sci.Technol, 1986,A4(3): 764.

[3] Instruction Manual[Z]. Colorado,America :Ion Tech,Inc, 1997.

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Uniformity Analysis for Broad-beam Ion Source[J]. Opto-Electronic Engineering, 2002, 29(5): 59

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