Author Affiliations
1Institute for Advanced Materials and Technology, University of Science and Technology, Beijing 100083, China2Tianjin Jinhang Institute of Technical Physics, Tianjin 300308, China3Shunde Graduate School, University of Science and Technology Beijing, Foshan 528399, Chinashow less
Fig. 1. Schematic diagram of energy level structure of Nd:YAG crystal
[18] Fig. 2. Absorption behavior of diamond and graphite
[21] Fig. 3. Microscopic morphology of non-bond end-face grinding wheel with conical abrasive array structure
[24] Fig. 4. (a) Effect of pulse duration on diamond ablation threshold; (b) Incubation effect
[25] Fig. 5. Effect of plating different absorption layers on the transmittance of processed diamond
[31] Fig. 6. Fluorescence image of NV color center array
[33] Fig. 7. Scanning electron microscope images of diamond surface irradiated by 800 nm femtosecond laser. (a) 170 nm periodic structure formed at 3000 pulse laser energy density of 1.9 J/cm
2; (b) 190 nm periodic structure formed at 8000 pulse laser energy density of 2.8 J/cm
2[36] Fig. 8. With the increase of pulse time delay, the evolution of diamond surface morphology array
[37] Fig. 9. Interaction model between laser, electron and lattice
[23]. (a) Nanosecond laser; (b) Femtosecond laser
Fig. 10. FIB cross sections of PCD composites obtained by: (a) Lapping; (b) Wire EDM; (c) Laser when pulse width =10 ps; (d) Laser when pulse width =125 ns; (e) Laser when pulse width =450 μs
Fig. 11. Heat conduction and temperature distribution in the single crystal diamond at different scanning time, in which the arrowheads indicate the conductive heat flux direction
[45] Fig. 12. Raman spectral images of machined pits under different laser fluxes
Fig. 13. Raman spectra of picosecond laser ablation of diamond micro-grooves at different laser energies
Fig. 14. (a) Schematic diagram of ps laser processing; (b) Optical picture of graphitized microstructure device; (c) Influence of orientation on machining morphology and machining threshold
[52-53] Fig. 15. Scanning electron microscope images of single crystal diamond surface processed by 200 fs laser. (a) Curved structure processed by laser pulse energy of 1.2 mJ; (b) The machined surface image when the laser pulse energy is 840 nJ; (c) An enlarged image of figure (b)
[59] Fig. 16. Surface morphology of laser processing. (a) Nanosecond laser; (b) Femtosecond lasers
[60] Fig. 17. Machining diamond through holes on silicon ball substrate by double pulse laser machining surface morpholog
[68] Fig. 18. The average aspect ratio obtained in diamond is 40∶1
[69] Fig. 19. Diamond microgrooves processed by process optimization parameters. (a) Surface morphology; (b) Cross-sectional morphology
[26] Fig. 20. Photos of manifold diamond microchannel
[75] Fig. 21. Schematic diagram of laser ablation
[79] Fig. 22. Surface roughness of diamond with different scanning ranges. (a) 100 μm×100 μm; (b)10 μm×10 μm
[85] Fig. 23. The cross section SEM image of diamond sample after fs-laser treatment
[87] Fig. 24. CO
2 laser/water-guided laser hybrid machining system
[88] Fig. 25. Scanning electron microscope images of the ablation made with laser in silicon without. (a) And with water spray; (b) Both are made using 1000 pulses with 2.2 J energy per hole
[93] Property | Value | Application | Bandgap/eV | 5.4 | High-temperature electronics | Carrier mobility/(cm2·V−1·s−1) | Holes 3 800; electrons 4 500 | Radiation-hard detectors Optoelectronic switches | Resistivity/Ω·cm | 1013-1015 | | Thermal conductivity/(W·m−1·K−1) | 2 000-2 400 | Heat sinks | Dielectric constant | 5.7 | | Optical transmission range | 225 nm- radio frequency | Photonics and MW devices | Hardness/GPa | (81±18) | Tools, surgery blades | Acoustic wave velocity/(km·s−1) | 18.4 along <100> | Surface acoustic wave devices | Thermal expansion coefficient/(10−6 ·K−1) | 0.8(293 K) | Photonics and MW devices | Corrosion resistance | Stable in HF | Electrochemistry | Negative electron affinity | | Electron emitters | Biocompatibility | | Biomedicine |
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Table 1. Properties and applications of diamond
Type | Nd:YAG | Ti:Al2O3 | Cu | Ar+ | KrF | ArF | CO2 | Wavelength/nm | 1 064 | 532 | 800 | 510.5 | 488 | 248 | 193 | 10 600 | Energy/eV | 1.17 | 2.33 | 1.55 | 2.42 | 2.54 | 5.0 | 6.42 | 0.12 | Mode | Pulse/continuous | Pulse | Pulse | Continuous | Pulse | Pulse | Pulse |
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Table 2. Types of laser used in diamond processing
Processing type | Laser type | Highlight | Processing result | Reference | Cutting | 193 nm;25 ns | Argon gas is injected to change the processing atmosphere | Avoid plasma heat damage | [64] | Cutting | 1.06 μm;100 μs | The optimum process parameters were determined by orthogonal experiment | Section roughness: Ra=0.65 μm; Slit width: 173.1 μm; Taper: 5.9° | [66] | Drilling | 532 nm;20 ns | Low taper, high aspect ratio structure | Maximum aspect ratio: 66:1; Minimum taper: 0.1°(aspect ratio 10:1) | [69] | Drilling | 1030 nm;230 fs | Effect of laser parameters on micropore geometry | Micropore no debris, no heat damage | [67] | Microchannel | 800 nm;120 fs | Combined with the experiment and simulation, the micro-channel "cold" machining is realized | Interface side taper <3°no residue, crack, edge breakage and other defects on the surface | [26] | Microchannel | 800 nm;100 fs | The diamond microstructure array constitutes the X-ray source array anode | Microstructure groove width: 20 μm; Groove depth: 45 μm | [74] | Microchannel | 1060 nm;200 ns | Microslot linear repeat two scans | The bottom of the microgroove is wide and flat | [42] | Microchannel | 800 nm;120 fs | Laser induced formation of nanoscale linear grooves | Slot width: 40 nm; the groove depth is 500 nm;Length: 0.3 mm; Average spacing: (146±7) nm | [78] | Planarization | 355 nm;25 ns | Laser polishing is directly used in optical device manufacturing | Roughness Ra= 8.02 nm (20× 20 μm2); The light transmittance reaches 47.1% | [79] | Planarization | 1.06 μm;100 μs | High efficiency flat rough diamond surface | Surface roughness Sa= 1.9 μm; material removal rate 1.1mm3/min | [9] | Separation | 800 nm;50 fs | The laser forms a non-diamond phase on the subsurface | Electrochemical stripping is achieved after epitaxial thickening | [87] | Hybrid laser | CO2 laser/water guided laser | The CO2 laser is processed and the water guided laser is used to quench the heating zone | Cut sheets faster | [88] | Water guided laser | ------ | The waterway extends the laser focus and improves the axial processing efficiency | With a carbon layer formed only on the surface, stress is reduced | [90] | Water-assisted laser | 790 nm;120 fs | Water mist assisted infrared laser ablation | No self-organizing structure is generated | [93] | Water-assisted laser | 532 nm;652 ps | CVD diamond-coated tools are used to process cross-scale microstructures | The precise microslot array and two composite microstructures were prepared | [96] |
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Table 3. Research progress of different processing types of laser processing diamond