• Spectroscopy and Spectral Analysis
  • Vol. 31, Issue 4, 1138 (2011)
LIU Zhen1、2、*, LI Xu1、2, MA Yue-ying1, CHEN Bo1, and CAO Jian-lin1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: Cite this Article
    LIU Zhen, LI Xu, MA Yue-ying, CHEN Bo, CAO Jian-lin. Development of Soft X-Ray Multilayer Mirror at 23.4 nm[J]. Spectroscopy and Spectral Analysis, 2011, 31(4): 1138 Copy Citation Text show less
    References

    [5] Patelli A, Ravagnan J, Rigato V, et al.Applied Surface Science, 2004, 238(7): 262.

    [6] Windt D L, Donguy S, Seely J, et al.Proc.of SPIE, 2004, 5168(1): 1.

    [7] Spiller Eberhard.SPIE-The International Society for optical Engineering, 1994, 145: 199.

    [8] Soufli Regina, Windt David L, Robinson Jeff C, et al.Proc.of SPIE, 2005, 5901(0277): M-1.

    [9] Voorma H J, Louis E, Koster N B, et al.J.Appl.Phys., 1997, 81(9): 6112.

    [10] Maury H, Jonnard P, André J M, et al.Thin Solid Films, 2006, 514: 278.

    [13] Steams D G, Gaines D P, Sweeney D W, et al.J.Appl.Phys., 1998, 84(2): 1003.

    [14] Spiller E, Rosenbluth A E.Opt.Eng., 1986, 25: 954.

    [15] Spiller E.Revue Phys.Appl., 1988, 23: 1687.

    [16] Slaughter J M, Schulze Dean W, Hills C R, et al.J.Appl.Phys., 1994, 76(4): 2144.

    LIU Zhen, LI Xu, MA Yue-ying, CHEN Bo, CAO Jian-lin. Development of Soft X-Ray Multilayer Mirror at 23.4 nm[J]. Spectroscopy and Spectral Analysis, 2011, 31(4): 1138
    Download Citation