Effect of Helium on Diamond Films Deposited Using Microwave PCVD

CAO Wei; MA Zhi-bin; TAO Li-ping; GAO Pan; LI Yi-cheng; FU Qiu-ming

doi:10.3964/j.issn.1000-0593(2015)03-0711-04

Journals >Spectroscopy and Spectral Analysis >Volume 35 >Issue 3 >Page 711 > Article

Spectroscopy and Spectral Analysis
Vol. 35, Issue 3, 711 (2015)

Effect of Helium on Diamond Films Deposited Using Microwave PCVD

CAO Wei^*, MA Zhi-bin, TAO Li-ping, GAO Pan, LI Yi-cheng, and FU Qiu-ming

Author Affiliations

[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2015)03-0711-04 Cite this Article

CAO Wei, MA Zhi-bin, TAO Li-ping, GAO Pan, LI Yi-cheng, FU Qiu-ming. Effect of Helium on Diamond Films Deposited Using Microwave PCVD[J]. Spectroscopy and Spectral Analysis, 2015, 35(3): 711 Copy Citation Text

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References

[1] Alix Gicquel, Khaled Hassouni, Francois Silva, et al. Current Applied Physics, 2001, 1(6): 479.

[2] Wang Chuansheng, Chen Huangchin, Wen-Ching Shih, et al. Diamond & Related Material, 2010, 19(2-3): 138.

[3] Rishi Sharma, Nicolas Woehrl, Milan Vrucinic, et al. Thin Solid Films, 2011, 519(22): 7632.

[4] Liao Wenhsiang, Lin Chiiruey, Wei Dahua. Applied Surface Science, 2013, 270: 324.

[6] Tallaire A, Collins A T, Charles D, et al. Diamond &Related Materials, 2006, 15(10): 1700.

[7] Fox O J L, Ma J, May P W, et al. Diamond & Related Materials, 2009, 18(5-8): 750.

[8] Zhang Y F, Zhang F, Gao Q J, et al. Diamond & Related Materials, 2001, 10(8): 1523.

[9] Kazunari Katayama, Satoshi Fukada, Masabumi Nishikawa. Fusion Engineering and Design, 2010, 85(7-9): 1381.

[11] Cicala G, Monéger D, Cornacchia D, et al. Surface & Coatings Technology, 2012, 211: 152.

CAO Wei, MA Zhi-bin, TAO Li-ping, GAO Pan, LI Yi-cheng, FU Qiu-ming. Effect of Helium on Diamond Films Deposited Using Microwave PCVD[J]. Spectroscopy and Spectral Analysis, 2015, 35(3): 711

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