Preparation of Al2O3 Dielectric Layers at Room Temperature Based on Flexible Displays

Yao Rihui; Zheng Zeke; Zeng Yong; Hu Shiben; Liu Xianzhe; Tao Ruiqiang; Chen Jianqiu; Cai Wei; Ning Honglong; Xu Miao; Wang Lei; Lan Linfeng; Peng Junbiao

doi:10.3788/aos201737.0331001

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