Absolute testing of planarity and inhomogeneity with modified six-step method

Zhang Shuai; Quan Haiyang; Hou Xi; Hu Xiaochuan; Wu Gaofeng

doi:10.12086/oee.2021.210047

[1] Adachi I, Asuda M T, Nishiyama S. A testing of optical materials by the Twyman type interferometer[J]. Atti Fond Giorgio Ronchi Contrib 1st Nax Ottica, 1961, 16: 666–674.

[2] Guo Y W. A surface shape test method for a thin flat mirror[J]. Optik, 2018, 152: 116–126.

[3] Ai C, Wyant J C. Measurement of the inhomogeneity of a window[J]. Opt Eng, 1991, 30(9): 1399.

[4] Roberts F E, Langenbeck P. Homogeneity evaluation of very large disks[J]. Appl Opt, 1969, 8(11): 2311–2314.

[5] Schwider J, Burow R, Elssner K E, et al. Homogeneity testing by phase sampling interferometry[J]. Appl Opt, 1985, 24(18): 3059–3061.

[9] Evans C J, Hocken R J, Estler W T. Self-calibration: reversal, redundancy, error separation, and 'absolute testing'[J]. CIRP Ann, 1996, 45(2): 617–634.

[11] Park J, Chen L F, Wang Q D, et al. Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers[J]. Opt Express, 2012, 20(18): 20078–20089.

[12] Deck L L. Multiple-surface phase-shifting interferometry[J]. Proc SPIE, 2001, 4451: 424–431.

[13] Mantel K, Schwider J. Interferometric homogeneity test using adaptive frequency comb illumination[J]. Appl Opt, 2013, 52(9): 1897–1912.

[16] Guo R H, Liao Z S, Li J X, et al. Optical homogeneity measurement of parallel plates by wavelength-tuning interferometry using nonuniform fast Fourier transform[J]. Opt Express, 2019, 27(9): 13072–13082.

[18] Fritz S B. Absolute calibration of an optical flat[J]. Opt Eng, 1984, 23(4): 234379.

[19] Quan H Y, Hou X, Wu F, et al. Absolute measurement of optical flats based on basic iterative methods[J]. Opt Express, 2015, 23(12): 16305–16319.

[20] Vannoni M V, Sordini A, Molesini G. Calibration of absolute planarity flats: generalized iterative approach[J]. Opt Eng, 2012, 51(8): 081510.

[21] Griesmann U. Three-flat test solutions based on simple mirror symmetry[J]. Appl Opt, 2006, 45(23): 5856–5865.

[23] Huan H Y, Xi H, Wu F. Evaluating surface repeatability for interferometric measurement: a comparative study[J]. Proc SPIE, 2016, 9684: 96842M.

[24] Hou X, Yang P, Wu F, et al. Comparative experimental study on absolute measurement of spherical surface with two-sphere method[J]. Opt Lasers Eng, 2011, 49(7): 833–840.