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    Journals >Optics and Precision Engineering >Volume 15 >Issue 9 >Page 1377 > Article
    • Optics and Precision Engineering
    • Vol. 15, Issue 9, 1377 (2007)
    Study on internal stress of thick SU-8 layer in MEMS
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  • 2[in Chinese]
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    [in Chinese], [in Chinese]. Study on internal stress of thick SU-8 layer in MEMS[J]. Optics and Precision Engineering, 2007, 15(9): 1377 Copy Citation Text show less

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    [in Chinese], [in Chinese]. Study on internal stress of thick SU-8 layer in MEMS[J]. Optics and Precision Engineering, 2007, 15(9): 1377
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