Quanli ZHANG, Boxin XU, Jiahao LI, Jian LIU, Mingtao WU, Yucan FU. Experimental study of nanosecond laser ablation mechanism and polishing of CVD diamond (inner cover paper·invited)[J]. Infrared and Laser Engineering, 2024, 53(10): 20240285

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- Infrared and Laser Engineering
- Vol. 53, Issue 10, 20240285 (2024)

Fig. 1. Distribution of laser energy density along the spot radius (φ 0=3 000 J/cm2)

Fig. 2. Finite element simulation meshing diagram

Fig. 3. Temperature field distribution of CVD diamond surface laser ablation simulation

Fig. 4. Simulation results for different laser incidence angles. (a) Tilt angle=10°; (b) Tilt angle=30°; (c) Tilt angle=50°; (d) Tilt angle=60°

Fig. 5. Original surface morphology of CVD diamond. (a) Scanning electron microscopy image; (b) Three-dimensional topography

Fig. 6. Effect of incident angle on surface roughness of CVD diamond at different laser powers

Fig. 7. Three-dimensional topography of laser ablated CVD diamond surface at different incidence angles with laser power 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°

Fig. 8. Three-dimensional topography of CVD diamond surface ablated by laser at 60° laser incidence angle with different power. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W

Fig. 9. Surface morphology of laser ablated CVD diamond at different incidence angles with laser power of 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°

Fig. 10. Surface morphology of CVD diamond at 60° laser incidence angle. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W

Fig. 11. Effect of laser scanning speed on surface roughness of CVD diamond

Fig. 12. Three-dimensional topography of CVD diamond under different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s

Fig. 13. Surface morphology of CVD diamond at different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s

Fig. 14. Effect of the number of laser scans on the surface roughness of CVD diamonds

Fig. 15. Three-dimensional topography of CVD diamond under different laser scanning times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25

Fig. 16. Surface morphology of CVD diamond under different laser processing times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25
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Table 1. CVD diamond and graphite material properties
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Table 2. Infrared nanosecond laser main performance parameters
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Table 3. Laser processing test parameters

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