• Infrared and Laser Engineering
  • Vol. 53, Issue 10, 20240285 (2024)
Quanli ZHANG1, Boxin XU1, Jiahao LI1, Jian LIU1..., Mingtao WU2,* and Yucan FU1|Show fewer author(s)
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
  • 2Sichuan Precision and Ultra-Precision Machining Engineering Technology Center, Chengdu 610200, China
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    DOI: 10.3788/IRLA20240285 Cite this Article
    Quanli ZHANG, Boxin XU, Jiahao LI, Jian LIU, Mingtao WU, Yucan FU. Experimental study of nanosecond laser ablation mechanism and polishing of CVD diamond (inner cover paper·invited)[J]. Infrared and Laser Engineering, 2024, 53(10): 20240285 Copy Citation Text show less
    Distribution of laser energy density along the spot radius (φ0=3 000 J/cm2)
    Fig. 1. Distribution of laser energy density along the spot radius (φ0=3 000 J/cm2)
    Finite element simulation meshing diagram
    Fig. 2. Finite element simulation meshing diagram
    Temperature field distribution of CVD diamond surface laser ablation simulation
    Fig. 3. Temperature field distribution of CVD diamond surface laser ablation simulation
    Simulation results for different laser incidence angles. (a) Tilt angle=10°; (b) Tilt angle=30°; (c) Tilt angle=50°; (d) Tilt angle=60°
    Fig. 4. Simulation results for different laser incidence angles. (a) Tilt angle=10°; (b) Tilt angle=30°; (c) Tilt angle=50°; (d) Tilt angle=60°
    Original surface morphology of CVD diamond. (a) Scanning electron microscopy image; (b) Three-dimensional topography
    Fig. 5. Original surface morphology of CVD diamond. (a) Scanning electron microscopy image; (b) Three-dimensional topography
    Effect of incident angle on surface roughness of CVD diamond at different laser powers
    Fig. 6. Effect of incident angle on surface roughness of CVD diamond at different laser powers
    Three-dimensional topography of laser ablated CVD diamond surface at different incidence angles with laser power 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°
    Fig. 7. Three-dimensional topography of laser ablated CVD diamond surface at different incidence angles with laser power 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°
    Three-dimensional topography of CVD diamond surface ablated by laser at 60° laser incidence angle with different power. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W
    Fig. 8. Three-dimensional topography of CVD diamond surface ablated by laser at 60° laser incidence angle with different power. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W
    Surface morphology of laser ablated CVD diamond at different incidence angles with laser power of 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°
    Fig. 9. Surface morphology of laser ablated CVD diamond at different incidence angles with laser power of 40 W. (a) Laser incidence angle=10°; (b) Laser incidence angle=30°; (c) Laser incidence angle=50°; (d) Laser incidence angle=60°
    Surface morphology of CVD diamond at 60° laser incidence angle. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W
    Fig. 10. Surface morphology of CVD diamond at 60° laser incidence angle. (a) Laser power=20 W; (b) Laser power=30 W; (c) Laser power=40 W; (d) Laser power=50 W
    Effect of laser scanning speed on surface roughness of CVD diamond
    Fig. 11. Effect of laser scanning speed on surface roughness of CVD diamond
    Three-dimensional topography of CVD diamond under different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s
    Fig. 12. Three-dimensional topography of CVD diamond under different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s
    Surface morphology of CVD diamond at different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s
    Fig. 13. Surface morphology of CVD diamond at different laser scanning speeds. (a) Scanning speed=200 mm/s; (b) Scanning speed=250 mm/s; (c) Scanning speed=100 mm/s; (d) Scanning speed=300 mm/s
    Effect of the number of laser scans on the surface roughness of CVD diamonds
    Fig. 14. Effect of the number of laser scans on the surface roughness of CVD diamonds
    Three-dimensional topography of CVD diamond under different laser scanning times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25
    Fig. 15. Three-dimensional topography of CVD diamond under different laser scanning times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25
    Surface morphology of CVD diamond under different laser processing times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25
    Fig. 16. Surface morphology of CVD diamond under different laser processing times. (a) Scanning times=5; (b) Scanning times=15; (c) Scanning times=20; (d) Scanning times=25
    Material propertiesCVD diamondGraphite
    Density/kg·m−335152090-2330
    Specific heat capacity/J·(kg·K)−118272248
    Thermal conductivity/W·(m·K)−12000151
    Oxidation temperature/K993-1073873-973
    Coefficient of thermal expansion/K−11.1×10−64.5×10−6
    Table 1. CVD diamond and graphite material properties
    Technical parameterValue
    Maximum average power P/W50
    Wavelength λ/nm1064
    Pulse width tp/ns120
    Pulse repetition rate f/kHz20-5000
    Spot diameter d/μm40
    Table 2. Infrared nanosecond laser main performance parameters
    NumberTilt/(°)Power/WScanning speed/mm·s−1Scanning frequency/kHzProcessing times, N
    1020/30/40/5020010010
    21020/30/40/5020010010
    32020/30/40/5020010010
    43020/30/40/5020010010
    54020/30/40/5020010010
    65020/30/40/5020010010
    76020/30/40/5020010010
    86040100/150/200/250/30010010
    960402001005/10/15/20/25
    Table 3. Laser processing test parameters
    Quanli ZHANG, Boxin XU, Jiahao LI, Jian LIU, Mingtao WU, Yucan FU. Experimental study of nanosecond laser ablation mechanism and polishing of CVD diamond (inner cover paper·invited)[J]. Infrared and Laser Engineering, 2024, 53(10): 20240285
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