Researching | Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology

Journals >Chinese Optics Letters >Volume 13 >Issue Suppl. >Page S22205 > Article

Chinese Optics Letters
Vol. 13, Issue Suppl., S22205 (2015)

Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology

Xu Wang^* and Binzhi Zhang

Author Affiliations

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun 130033, China

show less

DOI: 10.3788/COL201513.S22205 Cite this Article Set citation alerts

Xu Wang, Binzhi Zhang. Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22205 Copy Citation Text

show less

References

[1] Y. Wang, L. Hang, M. Hu. Surf. Technol., 37, 51(2008).

[2] J. Wang, B. Wang, J. Zhang, S. Dong. Aviation Precis. Manuf. Technol., 44, 11(2008).

[3] H. Takino, N. Shibata, H. Itoh, T. Kobayashi, H. Tanaka, M. Ebi, K. Yamamura, Y. Sano, Y. Mori. Appl. Opt., 37, 5198(1998).

[4] H. Takino, K. Yamamura, Y. Sano, Y. Mori. Appl. Opt., 49, 4434(2010).

[5] K. Yamamuraa, H. Mimurab, K. Yamauchib, Y. Sano, A. Satio, T. Kinoshita, K. Endo, Y. Mori, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa. Proc. SPIE, 4782, 265(2002).

[6] I. Eichentopf, G. Böhm, T. Arnold. Surf. Coat. Technol., 205, S430(2011).

[7] I. Eichentopf, G. Böhm, J. Meister, T. Arnod. Plasma Process. Polym., 6, S204(2009).

[8] T. Arnold, G. Bohm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hansel, A. Schindler. Nucl. Instrum. Meth. Phys. Res. Sect. A, 616, 147(2010).

[9] P. K. Subrahmanyan, G. Gardopee. Proc. SPIE, 7018, 701809(2008).

[10] D. M. Allen, P. Shore, R. W. Evans, C. Fanara, W. O’Brien, S. Marson, W. O’Neill. CIRP Ann. Manuf. Technol., 58, 647(2009).

[11] M. Castelli, R. Jourdain, P. Morantz, P. Shore. Prec. Eng., 36, 467(2012).

[12] C. Fanara, P. Shore, J. R. Nicholls, N. Lyford, J. Kelley, J. Carr, P. Sommer. Adv. Eng. Mater., 8, 933(2006).

[13] W. O’Brien. Characterisation and material removal properties of the RAP™ process(2011).

[14] X. Wang. Chin. J. Lasers, 41, 0816001(2014).

Figures&Tables (11)

References (14)

Copy Citation Text

Xu Wang, Binzhi Zhang. Study on the surface roughness of a high-accuracy optical aspherical mirror fabricated with atmospheric pressure inductively coupled plasma chemical etching technology[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22205

Download Citation

Set citation alerts for the article

Set citation alerts for the article

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address