A novel method for fabricating phase diffractive elements is proposed. Distinguished from the common phase holographic interference,we used single laser beam coming out of the direct writing system to inscribe phase-type gratings. The direct writing system can modulate the intensity and polarization of the Gaussian laser beam. Based on the control ling of the exposure time,intensity and polarization of the writing light,a series of phase-type gratings were fabricated. The induced surface deformation was directly determined by scanning near-field optical microscopy (SNOM). Some qualitative analysis was made in the article. Compared with holographic interference method,the method above is more flexible,undemanding for the experimental condition,which may become a new way of fabricating diffractive optical elements with complicated surface profile and controllable diffractive characteristics.